DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME
First Claim
1. A displacement device comprising:
- a stator comprising a plurality of electrically conductive coils, the plurality of electrically conductive coils shaped to provide;
a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer;
a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer, the stator-y direction non-parallel to the stator-x direction;
the first and second portions of the first and second layers overlapping one another in a stator-z direction, the stator-z direction generally orthogonal to both the stator-x direction and the stator-y direction;
a moveable stage comprising one or more magnet arrays, the moveable stage moveable relative to the stator within a two-dimensional working region, the one or more magnet arrays comprising a first magnet array, the first magnet array comprising a plurality of first magnetization segments, each first magnetization segment having a corresponding first magnetization direction;
one or more amplifiers connected to drive a plurality of currents in the plurality of electrically conductive coils;
a controller connected to deliver signals to the one or more amplifiers and configured, by using such signals, to control the currents driven by the one or more amplifiers and to thereby cause the moveable stage to track a desired position, (xr,yr), within the working region, where xr is a desired position of the moveable stage in the stator-x direction in the working region and yr is a desired position of the moveable stage in the stator-y direction in the working region;
wherein;
the controller is configured to control the currents driven by the one or more amplifiers to drive first currents, ix, in at least some of the first plurality of coil traces and to drive second currents, iy, in at least some of the second plurality of coil traces;
the first currents, ix, comprise a plurality of first current phases, ikx, each first current phase, ikx, driven into a corresponding one of the at least some of the first plurality of coil traces and phase-adjacent first current phases driven into spatially adjacent ones of the at least some of the first plurality of coil traces, where;
k is an integer from 0 to np−
1 representing a first phase index; and
np is a number greater than or equal to two of different effective phases in the first currents, ix;
each first current phase, ikx, is determined based on a function F(yr), where F(yr) is a spatially periodic function of yr in the stator-y direction over the working region, with a first spatial period, λ
1;
each first current phase, ikx, in a particular one of the at least some of the first plurality of coil traces is out of phase, as a function of yr, with one or more phase-adjacent first current phases in one or more spatially adjacent ones of the at least some of the first plurality of coil traces by a first spatial phase difference
1 Assignment
0 Petitions
Accused Products
Abstract
A displacement device comprise a stator having a plurality of electrically conductive coils shaped to provide: a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer; a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer. The first and second portions of the first and second layers overlapping one another in a stator-z direction. The displacement device also comprises a moveable stage having one or more magnet arrays. The moveable stage is moveable relative to the stator within a two-dimensional working region. The one or more magnet arrays include a first magnet array comprising a plurality of first magnetization segments, each having a corresponding first magnetization direction. The displacement device comprises one or more amplifiers connected to drive a plurality of currents in the plurality of electrically conductive coils; and a controller configured to control the currents driven by the one or more amplifiers and to thereby cause the moveable stage to track a desired position, (xr,yr), within the working region.
20 Citations
72 Claims
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1. A displacement device comprising:
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a stator comprising a plurality of electrically conductive coils, the plurality of electrically conductive coils shaped to provide; a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer; a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer, the stator-y direction non-parallel to the stator-x direction; the first and second portions of the first and second layers overlapping one another in a stator-z direction, the stator-z direction generally orthogonal to both the stator-x direction and the stator-y direction; a moveable stage comprising one or more magnet arrays, the moveable stage moveable relative to the stator within a two-dimensional working region, the one or more magnet arrays comprising a first magnet array, the first magnet array comprising a plurality of first magnetization segments, each first magnetization segment having a corresponding first magnetization direction; one or more amplifiers connected to drive a plurality of currents in the plurality of electrically conductive coils; a controller connected to deliver signals to the one or more amplifiers and configured, by using such signals, to control the currents driven by the one or more amplifiers and to thereby cause the moveable stage to track a desired position, (xr,yr), within the working region, where xr is a desired position of the moveable stage in the stator-x direction in the working region and yr is a desired position of the moveable stage in the stator-y direction in the working region; wherein; the controller is configured to control the currents driven by the one or more amplifiers to drive first currents, ix, in at least some of the first plurality of coil traces and to drive second currents, iy, in at least some of the second plurality of coil traces; the first currents, ix, comprise a plurality of first current phases, ikx, each first current phase, ikx, driven into a corresponding one of the at least some of the first plurality of coil traces and phase-adjacent first current phases driven into spatially adjacent ones of the at least some of the first plurality of coil traces, where; k is an integer from 0 to np−
1 representing a first phase index; andnp is a number greater than or equal to two of different effective phases in the first currents, ix; each first current phase, ikx, is determined based on a function F(yr), where F(yr) is a spatially periodic function of yr in the stator-y direction over the working region, with a first spatial period, λ
1;each first current phase, ikx, in a particular one of the at least some of the first plurality of coil traces is out of phase, as a function of yr, with one or more phase-adjacent first current phases in one or more spatially adjacent ones of the at least some of the first plurality of coil traces by a first spatial phase difference - View Dependent Claims (2, 3, 4, 6, 10, 11, 13, 31, 33, 34, 35, 36, 37, 46, 47, 48, 52, 53)
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5. (canceled)
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7-9. -9. (canceled)
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12. (canceled)
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14-30. -30. (canceled)
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32. (canceled)
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38-45. -45. (canceled)
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49-51. -51. (canceled)
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54-70. -70. (canceled)
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71. A method, in a displacement device, for controlling the movement of a moveable stage relative to a stator, the method comprising:
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providing a stator comprising a plurality of electrically conductive coils, the plurality of electrically conductive coils shaped to provide; a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer; a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer, the stator-y direction non-parallel to the stator-x direction; the first and second portions of the first and second layers overlapping one another in a stator-z direction, the stator-z direction generally orthogonal to both the stator-x direction and the stator-y direction; providing a moveable stage comprising one or more magnet arrays, the moveable stage moveable relative to the stator within a two-dimensional working region, the one or more magnet arrays comprising a first magnet array, the first magnet array comprising a plurality of first magnetization segments, each first magnetization segment having a corresponding first magnetization direction; controllably driving a plurality of currents into the plurality of electrical coils to thereby cause the moveable stage to track a desired position, (xr,yr), within the working region, where xr is a desired position of the moveable stage in the stator-x direction in the working region and yr is a desired position of the moveable stage in the stator-y direction in the working region; wherein controllably driving the plurality of currents into the plurality of electrical coils comprises; driving first currents, ix, in at least some of the first plurality of coil traces and driving second currents, iy, in at least some of the second plurality of coil traces; the first currents, ix, comprising a plurality of first current phases, ikx, each first current phase, ikx, driven into a corresponding one of the at least some of the first plurality of coil traces and phase-adjacent first current phases driven into spatially adjacent ones of the at least some of the first plurality of coil traces, where; k is an integer from 0 to np−
1 representing a first phase index; andnp is a number of different effective phases in the first currents, ix; each first current phase, ikx, is determined based on a function F(yr), where F(yr) is a spatially periodic function of yr in the stator-y direction over the working region, with a first spatial period, λ
1;each first current phase, ikx, in a particular one of the at least some of the first plurality of coil traces is out of phase, as a function of yr, with one or more phase-adjacent first current phases in one or more spatially adjacent ones of the at least some of the first plurality of coil traces by a first spatial phase difference
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72-92. -92. (canceled)
Specification