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PROCESSING DEVICE AND PROCESSING METHOD

  • US 20170182590A1
  • Filed: 01/26/2015
  • Published: 06/29/2017
  • Est. Priority Date: 03/31/2014
  • Status: Active Grant
First Claim
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1. A processing device that processes a member to be processed by irradiating the member to be processed with a laser, the device comprising:

  • a laser oscillator including a plurality of vertical cavity surface-emitting laser elements that output a laser having a wavelength of no greater than 1,070 nm, and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix;

    a guidance optical system that guides the laser outputted from the laser oscillator; and

    a control device that controls the output of the laser oscillator.

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