PROCESSING DEVICE AND PROCESSING METHOD
First Claim
1. A processing device that processes a member to be processed by irradiating the member to be processed with a laser, the device comprising:
- a laser oscillator including a plurality of vertical cavity surface-emitting laser elements that output a laser having a wavelength of no greater than 1,070 nm, and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix;
a guidance optical system that guides the laser outputted from the laser oscillator; and
a control device that controls the output of the laser oscillator.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided are a processing device and a processing method with which the device can be made more compact, and with which highly precise processing can be performed. The processing device, which processes a member to be processed by irradiating the member to be processed with a laser, has: a laser oscillator having a plurality of vertical cavity surface-emitting laser diode chips that output laser light having a wavelength of 1,070 nm or less, and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix; a guidance optical system that guides the laser light output from the laser oscillator; and a control device that controls the output of the laser oscillator.
5 Citations
20 Claims
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1. A processing device that processes a member to be processed by irradiating the member to be processed with a laser, the device comprising:
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a laser oscillator including a plurality of vertical cavity surface-emitting laser elements that output a laser having a wavelength of no greater than 1,070 nm, and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix; a guidance optical system that guides the laser outputted from the laser oscillator; and a control device that controls the output of the laser oscillator. - View Dependent Claims (2, 3, 4, 8, 9, 10, 11, 12, 16, 17, 18)
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5. A processing device that processes a member to be processed, the device comprising:
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a processing head that processes the member to be processed; a heating head that heats the member to be processed, the heating head including a laser oscillator, which has a plurality of vertical cavity surface-emitting laser diode chips that output a laser and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix, and a guidance optical system that guides the laser outputted from the laser oscillator; and a control device that controls the heating of the member to be processed by controlling the output of the laser oscillator. - View Dependent Claims (6, 7, 15, 19, 20)
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13. A processing method for processing a member to be processed by irradiating the member to be processed with a laser, the method comprising:
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outputting a laser having a wavelength of no greater than 1,070 nm from a plurality of vertical cavity surface-emitting laser diode chips arranged in a matrix on a surface; and processing the member to be processed by guiding the outputted laser using a guidance optical system.
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14. A processing method for processing a member to be processed by irradiating the member to be processed with a laser, the method comprising:
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heating the member to be processed by outputting a laser from a plurality of vertical cavity surface-emitting laser diode chips arranged in a matrix on a surface and guiding the outputted laser using a guidance optical system; and processing the member to be processed using a processing head.
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Specification