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MICRO ELECTRO MECHANICAL SYSTEM, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF

  • US 20170182853A1
  • Filed: 03/16/2017
  • Published: 06/29/2017
  • Est. Priority Date: 10/17/2005
  • Status: Active Grant
First Claim
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1. A tire comprising a wheel and a semiconductor device attached to the wheel, the semiconductor device comprising:

  • a transistor;

    an insulating layer over the transistor; and

    a sensor over the insulating layer, the sensor comprising a first electrode and a second electrode and electrically connected to the transistor.

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