MICRO ELECTRO MECHANICAL SYSTEM, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
First Claim
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1. A tire comprising a wheel and a semiconductor device attached to the wheel, the semiconductor device comprising:
- a transistor;
an insulating layer over the transistor; and
a sensor over the insulating layer, the sensor comprising a first electrode and a second electrode and electrically connected to the transistor.
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Abstract
The present invention provides a MEMS and a sensor having the MEMS which can be formed without a process of etching a sacrifice layer. The MEMS and the sensor having the MEMS are formed by forming an interspace using a spacer layer. In the MEMS in which an interspace is formed using a spacer layer, a process for forming a sacrifice layer and an etching process of the sacrifice layer are not required. As a result, there is no restriction on the etching time, and thus the yield can be improved.
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Citations
18 Claims
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1. A tire comprising a wheel and a semiconductor device attached to the wheel, the semiconductor device comprising:
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a transistor; an insulating layer over the transistor; and a sensor over the insulating layer, the sensor comprising a first electrode and a second electrode and electrically connected to the transistor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A tire comprising a wheel and a semiconductor device attached to the wheel, the semiconductor device comprising:
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a control circuit; a sensor over the control circuit, the sensor comprising a first electrode and a second electrode and electrically connected to the control circuit; and an antenna electrically connected to the control circuit. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification