COMPOUND FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FILM, AND PATTERNING PROCESS
First Claim
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1. A compound for forming an organic film which has a minimum complex viscosity of 10 Pa·
- s or less when the complex viscosity is measured within a range of 50°
C. to 300°
C.
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Abstract
The present invention provides a compound for forming an organic film which has a minimum complex viscosity of 10 Pa·s or less when the complex viscosity is measured within a range of 50° C. to 300° C. This compound for forming an organic film can provide an organic film composition having high filling and planarizing properties.
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19 Claims
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1. A compound for forming an organic film which has a minimum complex viscosity of 10 Pa·
- s or less when the complex viscosity is measured within a range of 50°
C. to 300°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
- s or less when the complex viscosity is measured within a range of 50°
Specification