MICROELECTROMECHANICAL GYROSCOPE WITH REJECTION OF DISTURBANCES AND METHOD OF SENSING AN ANGULAR RATE
First Claim
1. A microelectromechanical gyroscope comprising:
- a substrate;
a first structure, a second structure and a third structure elastically coupled to the substrate to be movable in a driving direction along a first axis, the first structure and the second structure being arranged at opposite sides of the third structure with respect to the first axis; and
a driving system configured to oscillate the first structure and the second structure along the first axis in phase with one another and to oscillate the third structure along the first axis in phase opposition with the first structure and the second structure;
the first structure, the second structure and the third structure being provided with respective sets of movable sensing electrodes configured to be displaced in a sensing direction along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.
4 Assignments
0 Petitions
Accused Products
Abstract
A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.
-
Citations
20 Claims
-
1. A microelectromechanical gyroscope comprising:
-
a substrate; a first structure, a second structure and a third structure elastically coupled to the substrate to be movable in a driving direction along a first axis, the first structure and the second structure being arranged at opposite sides of the third structure with respect to the first axis; and a driving system configured to oscillate the first structure and the second structure along the first axis in phase with one another and to oscillate the third structure along the first axis in phase opposition with the first structure and the second structure; the first structure, the second structure and the third structure being provided with respective sets of movable sensing electrodes configured to be displaced in a sensing direction along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18)
-
-
17. An electronic system comprising:
a gyroscope that includes; a substrate; a first structure, a second structure and a third structure elastically coupled to the substrate to be movable in a driving direction along a first axis, the first structure and the second structure being arranged at opposite sides of the third structure with respect to the first axis; and a driving system configured to oscillate the first structure and the second structure along the first axis in phase with one another and to oscillate the third structure along the first axis in phase opposition with the first structure and the second structure; the first structure, the second structure and the third structure being provided with respective sets of movable sensing electrodes configured to be displaced in a sensing direction along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis; and a control unit configured to control the gyroscope.
-
19. A method of sensing an angular rate comprising:
-
oscillating a first structure and a second structure in phase with one another, the first and second structures being elastically supported by a substrate along a first axis relative to the substrate; oscillating a third structure along the first axis relative to the substrate, in phase opposition with the first structure and the second structure, the third structure being arranged between the first structure and the second structure; sensing displacements of respective sets of movable sensing electrodes of the first structure, of the second structure and of the third structure, the movable sensing electrodes being configured to be displaced in a sensing direction along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis. - View Dependent Claims (20)
-
Specification