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COMPOUND FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FILM, AND PATTERNING PROCESS

  • US 20170184968A1
  • Filed: 12/07/2016
  • Published: 06/29/2017
  • Est. Priority Date: 12/24/2015
  • Status: Active Grant
First Claim
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1. A compound for forming an organic film shown by the formula (1A),
R—

  • (—

    X)m1



    (1A)wherein R represents a single bond or an organic group having 1 to 50 carbon atoms;

    X represents a group shown by the formula (1B); and

    ml represents an integer satisfying 2≦

    m1≦

    10,

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