METAL MIRROR BASED MULTISPECTRAL FILTER ARRAY
First Claim
Patent Images
1. A device, comprising:
- a multispectral filter array disposed on a substrate,the multispectral filter array including;
a first metal mirror disposed on the substrate,a spacer disposed on the first metal mirror,the spacer including a set of layers,a second metal mirror disposed on the spacer; and
wherein the second metal mirror is aligned with two or more sensor elements of a set of sensor elements.
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Abstract
A device may include a multispectral filter array disposed on the substrate. The multi spectral filter array may include a first metal mirror disposed on the substrate. The multi spectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
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Citations
20 Claims
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1. A device, comprising:
a multispectral filter array disposed on a substrate, the multispectral filter array including; a first metal mirror disposed on the substrate, a spacer disposed on the first metal mirror, the spacer including a set of layers, a second metal mirror disposed on the spacer; and wherein the second metal mirror is aligned with two or more sensor elements of a set of sensor elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An optical filter, comprising:
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a first layer, the first layer being a first mirror to reflect a portion of light directed toward the first layer, the first layer being deposited on a substrate associated with a set of sensor elements; a second set of layers, the second set of layers being deposited solely on the first layer, the second set of layers being associated with a set of channels corresponding to the set of sensor elements, a channel, of the set of channels, being associated with a particular thickness corresponding to a particular wavelength of light that is to be directed toward a particular sensor element of the set of sensor elements; and a third layer, the third layer being a second metal mirror to reflect a portion of light directed toward the third layer, the third layer being deposited on a plurality of the set of sensor elements associated with the second set of layers. - View Dependent Claims (13, 14, 15)
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16. A system, comprising:
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a set of optical sensors embedded into a substrate; and a multispectral filter array deposited on the substrate, the multispectral filter array including; a first silver (Ag) metal mirror, a second silver (Ag) metal mirror, and a plurality of spacer layers disposed between the first silver (Ag) metal mirror and the second silver (Ag) metal mirror. - View Dependent Claims (17, 18, 19, 20)
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Specification