SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
1 Assignment
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Accused Products
Abstract
A semiconductor device includes a semiconductor layer formed on a substrate, an electrode contact window that includes a recess formed on a surface of the semiconductor layer, an inner wall having a slope, and a source electrode, a drain electrode, and a gate electrode formed on the semiconductor layer, in which the drain electrode is in contact with the slope of the inner wall.
2 Citations
37 Claims
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1. -17. (canceled)
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18. A semiconductor device comprising:
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a semiconductor layer formed on a substrate, the semiconductor layer including an electron transit layer on the substrate, an electron supply layer on the electron transit layer, and a cap layer on the electron supply layer; an electrode contact window that includes a recess formed in the electron supply layer and the cap layer, an inner wall of the recess having a slanted slope, wherein the electron supply layer and the cap layer are exposed in the inner wall of the electrode contact window; and a source electrode, a drain electrode, and a gate electrode formed on the semiconductor layer, wherein the drain electrode is formed in the recess. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A semiconductor device comprising:
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a semiconductor layer formed on a substrate, the semiconductor layer including an electron transit layer on the substrate, an electron supply layer on the electron transit layer, and a cap layer on the electron supply layer; an electrode contact window that includes a recess formed in the electron supply layer and the cap layer, an inner wall of the recess having a slanted slope and a bottom wherein the bottom is formed in the electron supply layer; and a source electrode, a drain electrode, and a gate electrode formed on the semiconductor layer, wherein the drain electrode is formed in the recess. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification