X-RAY DIFFRACTOMETER

• US 20170191950A1
• Filed: 01/14/2015
• Published: 07/06/2017
• Est. Priority Date: 06/05/2014
• Status: Active Grant

• Current Assignee: Rigaku Corporation
• Original Assignee: Rigaku Corporation
• Inventors: OSAKABE, Takeshi, OZAWA, Tetsuya, JIANG, Licai, VERMAN, Boris, OMOTE, Kazuhiko, PLATONOV, Yuriy
• Granted Patent: US 10,436,723 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 2223/056 diffraction
• CPC Class Codes: G01N 2223/302 comparative arrangements
• CPC Class Codes: G01N 2223/315 monochromators
• CPC Class Codes: G01N 2223/32 adjustments of elements during operation
• CPC Class Codes: G01N 23/20008 Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor monochromators for X- rays using crystals G21K1/06
• CPC Class Codes: G01N 23/207 Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
• CPC Class Codes: G02B 27/0977 Reflective elements
• CPC Class Codes: G02B 27/4272 having plural diffractive elements positioned sequentially along the optical path
• CPC Class Codes: G02B 7/003 Alignment of optical elements G02B7/001, G02B7/002 take precedence; for mirrors G02B7/1822
• CPC Class Codes: G21K 1/04 using variable diaphragms, shutters, choppers
• CPC Class Codes: G21K 1/06 using diffraction, refraction or reflection, e.g. monochromators G21K1/10, G21K7/00 take precedence
• CPC Class Codes: G21K 1/062 Devices having a multilayer structure
• CPC Class Codes: G21K 2201/067 Construction details

Abstract

Only X-rays having a specific wavelength out of focusing X-rays 2 diffracted from a sample S is reflected from a monochromator 60 based on a Bragg'"'"'s condition, passed through a receiving slit 30 and detected by an X-ray detector 20. The monochromator 60 is configured to be freely removable, and arranged between the sample S and a focal point 2a at which the focusing X-rays 2 diffracted from the sample S are directly focused. At this time, the monochromator 60 is approached to the focal point 2a as closely as possible. The monochromator 60 comprises a multilayer mirror having an internal interplanar spacing which varies continuously from one end to the other end.

Claims

1. An X-ray diffractometer comprising:

an X-ray source for irradiating a sample with X-rays;

a reflection type monochromator for receiving focusing X-rays diffracted from a sample and reflecting only focusing X-rays having a specific wavelength based on a Bragg'"'"'s condition;

an X-ray detector for detecting focusing X-rays monochromated by the monochromator; and

a unit that adjusts measurement resolution of the X-ray detector, wherein the monochromator is arranged on an X-ray optical path between a focal point at which the focusing X-rays from the sample are directly focused and the sample.

2. The X-ray diffractometer according to claim 1, wherein the monochromator comprises a multilayer mirror having an internal interplanar spacing that varies continuously from one end to the other end.

3. The X-ray diffractometer according to claim 2, wherein the monochromator has an incident face for the focusing X-rays, the incident face being configured to be a flat surface.

4. The X-ray diffractometer according to claim 2, wherein the interplanar spacing in the multilayer mirror is adjusted so that a interplanar spacing d₁ in a depth direction at a site to which the focusing X-rays are incident at an incident angle θ

₁ and a interplanar spacing d₂ in the depth direction at a site to which the focusing X-rays are incident at an incident angle θ

₂ satisfy the following equation based on the Bragg'"'"'s condition;

2d₁×

sin θ

₁=2d₂×

sin θ

₂=nλ

, wherein λ

represents the wavelength of the diffracted X-rays, and n represents an integer.

5. The X-ray diffractometer according to claim 1, wherein the monochromator is arranged in proximity to a focal point at which the focusing X-rays diffracted from the sample are directly focused to the extent that the monochromator does not interfere with the X-ray detector.

6. The X-ray diffractometer according to claim 5, wherein the unit that adjusts the measurement resolution of the X-ray detector comprises a receiving slit arranged in front of an X-ray detection face in the X-ray detector.

7. The X-ray diffractometer according to claim 6, wherein the X-ray detector comprises a two-dimensional X-ray detector that is adapted to two-dimensionally detect X-rays incident to the X-ray detection face.

8. The X-ray diffractometer according to claim 6, wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;

the X-ray detection face of the X-ray detector has an area that allows detection of focusing X-rays diffracted from the sample in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of focusing X-rays that are diffracted from the sample and reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and

the receiving slit is configured to be freely positionally changeable between a position through which the focusing X-rays diffracted from the sample pass in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the focusing X-rays diffracted from the sample and reflected from the monochromator pass in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

9. The X-ray diffractometer according to claim 6, wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;

the receiving slit is configured to be freely positionally changeable between a position through which the focusing X-rays diffracted from the sample pass in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the focusing X-rays diffracted from the sample and reflected from the monochromator pass in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and

the X-ray detector is configured to be freely positionally changeable between a detection position of the focusing X-rays diffracted from the sample and passing through the receiving slit in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a detection position of the focusing X-rays diffracted from the sample, reflected from the monochromator and passing through the receiving slit in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

10. The X-ray diffractometer according to claim 5, wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;

the X-ray detector comprises a two-dimensional X-ray detector that is adaptable to two-dimensionally detect X-rays incident to the X-ray detection face;

the X-ray detection face of the X-ray detector has an area that allows detection of focusing X-rays diffracted from the sample in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of focusing X-rays that are diffracted from the sample and reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays;

the X-ray detector has a function of freely changing an X-ray detection area between a first X-ray detection area for detecting focusing X-rays diffracted from the sample in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a second X-ray detection area for detecting focusing X-rays diffracted from the sample and reflected from the monochromator in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and

the function of freely changing the X-ray detection area in the X-ray detector constitutes a unit that adjusts measurement resolution of the X-ray detector.

11. The X-ray diffractometer according to claim 7, wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.

12. The X-ray diffractometer according to claim 10, wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.