X-RAY DIFFRACTOMETER
First Claim
1. An X-ray diffractometer comprising:
- an X-ray source for irradiating a sample with X-rays;
a reflection type monochromator for receiving focusing X-rays diffracted from a sample and reflecting only focusing X-rays having a specific wavelength based on a Bragg'"'"'s condition;
an X-ray detector for detecting focusing X-rays monochromated by the monochromator; and
a unit that adjusts measurement resolution of the X-ray detector, wherein the monochromator is arranged on an X-ray optical path between a focal point at which the focusing X-rays from the sample are directly focused and the sample.
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Accused Products
Abstract
Only X-rays having a specific wavelength out of focusing X-rays 2 diffracted from a sample S is reflected from a monochromator 60 based on a Bragg'"'"'s condition, passed through a receiving slit 30 and detected by an X-ray detector 20. The monochromator 60 is configured to be freely removable, and arranged between the sample S and a focal point 2a at which the focusing X-rays 2 diffracted from the sample S are directly focused. At this time, the monochromator 60 is approached to the focal point 2a as closely as possible. The monochromator 60 comprises a multilayer mirror having an internal interplanar spacing which varies continuously from one end to the other end.
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Citations
12 Claims
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1. An X-ray diffractometer comprising:
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an X-ray source for irradiating a sample with X-rays; a reflection type monochromator for receiving focusing X-rays diffracted from a sample and reflecting only focusing X-rays having a specific wavelength based on a Bragg'"'"'s condition; an X-ray detector for detecting focusing X-rays monochromated by the monochromator; and a unit that adjusts measurement resolution of the X-ray detector, wherein the monochromator is arranged on an X-ray optical path between a focal point at which the focusing X-rays from the sample are directly focused and the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification