Method for Processing Polysilicon Thin Film and Method for Fabricating Thin Film Transistor
First Claim
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1. A method for processing a polysilicon thin film, comprising:
- etching the polysilicon thin film using etching particles,wherein an angle between an incident direction of the etching particles and the polysilicon thin film is larger than 0° and
less than 90°
.
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Abstract
A method for processing a polysilicon thin film and a method for fabricating a thin film transistor are provided. The method for processing a polysilicon thin film includes: etching the polysilicon thin film using etching particles. An angle between an incident direction of the etching particles and the polysilicon thin film is larger than 0° and less than 90°.
3 Citations
16 Claims
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1. A method for processing a polysilicon thin film, comprising:
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etching the polysilicon thin film using etching particles, wherein an angle between an incident direction of the etching particles and the polysilicon thin film is larger than 0° and
less than 90°
. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification