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MEMS PEIZOELECTRIC ACCELEROMETER WITH BUILT-IN SELF TEST

  • US 20170205440A1
  • Filed: 01/19/2016
  • Published: 07/20/2017
  • Est. Priority Date: 01/19/2016
  • Status: Abandoned Application
First Claim
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1. An accelerometer comprising:

  • a substrate having a proofmass and at least one coupling member, the at least one coupling member configured to mechanically couple the accelerometer to a device to be tested;

    a first MEMS piezoelectric transducer mounted to one of the at least one coupling member of the substrate and configured to deform the at least one coupling member in response to a first electrical signal received by the piezoelectric transducer;

    a second MEMS piezoelectric transducer mounted to one of the at least one coupling member of the substrate and configured to provide a second electrical signal in response to deformation of the at least one coupling member of the substrate; and

    a self-test module configured to generate the first electrical signal and to receive the second electrical signal, the self-test module configured to compare the received second electrical signal to a reference signal and configured to generate a test result based upon the comparison.

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