MASK FRAME ASSEMBLY, APPARATUS AND METHOD FOR MANUFACTURING A DISPLAY APPARATUS

• US 20170207390A1
• Filed: 01/03/2017
• Published: 07/20/2017
• Est. Priority Date: 01/15/2016
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: PARK, Jongsung, LEE, Sangshin, KIM, Sanghoon
• Granted Patent: US 9,997,708 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask frame assembly includes a frame having an opening, a support bar extended in a first direction crossing the opening of the frame and having distal ends installed over the frame, and a mask having extended in a second direction crossing the first direction, having distal ends installed over the frame, and having a pattern unit extended along the second direction and configured to pass a deposition material. The support bar includes a first opening disposed on one side of the support bar and having a first width in the second direction, and a second opening disposed on the other side of the support bar opposite to the one side of the support bar and having a second width greater than the first width in the second direction.

Claims

1. A mask frame assembly, comprising:

a frame comprising an opening;

a support bar extended in a first direction crossing the opening of the frame, and comprising distal ends installed over the frame; and

a mask extended in a second direction crossing the first direction, comprising distal ends installed over the frame, and comprising a pattern unit extended along the second direction and configured to pass a deposition material,

wherein the support bar comprises;

a first opening disposed on one side of the support bar, and having a first width in the second direction; and

a second opening disposed on the other side of the support bar opposite to the one side of the support bar, and having a second width greater than the first width in the second direction.

2. The mask frame assembly of claim 1, wherein the frame comprises reception grooves configured to respectively receive the distal ends of the support bar.

3. The mask frame assembly of claim 1, wherein the support bar is configured to cover a blocking area of the pattern unit to block the deposition material from passing through the blocking area of the pattern unit.

4. The mask frame assembly of claim 1, wherein the second width of the second opening is two times the first width of the first opening.

5. The mask frame assembly of claim 1, wherein the first opening and the second opening are symmetrical to each other in the second direction.

6. The mask frame assembly of claim 1, wherein the first opening and the second opening are respectively recessed from an outermost of the one side of the support bar and an outermost of the other side of the support bar.

7. The mask frame assembly of claim 1, wherein the first opening and the second opening are disposed in an inside of the support bar.

8. The mask frame assembly of claim 1, wherein:

the mask comprises a plurality of masks; and

the plurality of masks are continuously arranged in the first direction.

9. The mask frame assembly of claim 1, wherein:

the pattern unit comprises a plurality of pattern holes configured to pass the deposition material according to a predetermined pattern; and

the plurality of pattern holes are continuously arranged in the second direction.

10. An apparatus to manufacture a display apparatus, comprising:

a mask frame assembly; and

a deposition source disposed opposite to the mask frame assembly,

wherein the mask frame assembly comprises;

a frame comprising an opening;

a support bar extended in a first direction crossing the opening of the frame, and comprising distal ends installed over the frame; and

a mask extended in a second direction crossing the first direction, comprising distal ends installed over the frame, and comprising a pattern unit extended along the second direction and configured to pass a deposition material,

wherein the support bar comprises;

a first opening disposed on one side of the support bar, and having a first width in the second direction; and

a second opening disposed on the other side of the support bar opposite to the one side of the support bar, and having a second width greater than the first width in the second direction.

11. The apparatus of claim 10, wherein the frame comprises reception grooves configured to respectively receive the distal ends of the support bar.

12. The apparatus of claim 10, wherein the support bar is configured to cover a blocking area of the pattern unit to block the deposition material from passing through the blocking area of the pattern unit.

13. The apparatus of claim 10, wherein the second width of the second opening is two times the first width of the first opening.

14. The apparatus of claim 10, wherein the first opening and the second opening are symmetrical to each other in the second direction.

15. The apparatus of claim 10, wherein the first opening and the second opening are respectively recessed from an outermost of the one side of the support bar and an outermost of the other side of the support bar.

16. The apparatus of claim 10, wherein the first opening and the second opening are disposed in an inside of the support bar.

17. The apparatus of claim 10, wherein the mask is a plurality of masks which are continuously arranged in the first direction.

18. The apparatus of claim 10, wherein:

the pattern unit comprises a plurality of pattern holes configured to pass the deposition material according to a predetermined pattern; and

the plurality of pattern holes are continuously arranged in the second direction.

19. A method of manufacturing a display apparatus, comprising:

arranging a deposition source opposite a mask frame assembly and a substrate; and

gasifying or vaporizing a deposition material from the deposition source such that the deposition material passes through the mask frame assembly to be deposited on the substrate,

wherein the mask frame assembly comprises;

a frame comprising an opening;

a support bar extended in a first direction crossing the opening of the frame, and comprising distal ends installed over the frame; and

a mask extended in a second direction crossing the first direction, comprising distal ends installed over the frame, and comprising a pattern unit extended along the second direction and passing the deposition material,

wherein the support bar comprises;

a first opening disposed on one side of the support bar, and having a first width in the second direction; and

a second opening disposed on the other side of the support bar opposite to the one side of the support bar, and having a second width greater than the first width in the second direction.