ACCELEROMETER

• US 20170219619A1
• Filed: 03/31/2016
• Published: 08/03/2017
• Est. Priority Date: 02/03/2016
• Status: Abandoned Application

• Current Assignee: Globalmems Co., Ltd.
• Original Assignee: Globalmems Co., Ltd.
• Inventors: Chang, Chun-I, Wu, Ming-Ching
• Application Number:
  US15/086,081
• Publication Number:
  US 20170219619A1
• Time in Patent Office: Days
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An accelerometer includes a base, two elastic portions and two masses. The base includes a supporting portion. Each of the elastic portions is connected to the supporting portion. The supporting portion is located between the two masses, the two masses are connected to the two elastic portions respectively, and the base supports the two elastic portions and the two masses merely by the supporting portion. The two masses are adapted to produce movements to enable the two elastic portions to be elastically deformed.

Claims

1. An accelerometer, comprising:

a base, comprising a supporting portion;

two elastic portions, each of the elastic portions being connected to the supporting portion; and

two masses, the supporting portion being located between the two masses, the two masses respectively connected to the two elastic portions, the base supporting the two elastic portions and the two masses merely by the supporting portion, and the two masses being adapted to produce movements to enable the two elastic portions to be elastically deformed.

2. The accelerometer as recited in claim 1, wherein the base comprises a main body, the main body has an opening, the supporting portion, the two masses and the two elastic portions are located in the opening, an inner wall of the opening is connected to the supporting portion and separated from the two masses and the two elastic portions.

3. The accelerometer as recited in claim 1, wherein each of the masses has a connecting end, the connecting end is connected to the corresponding elastic portion, and each of the masses is supported by the base merely with the connecting end.

4. The accelerometer as recited in claim 1, wherein each of the elastic portions comprises a plurality of elastic arms, and each of the elastic arms is connected between the supporting portion and the corresponding mass.

5. The accelerometer as recited in claim 4, wherein the elastic arms of each of the elastic portions at least partially surround the corresponding mass.

6. The accelerometer as recited in claim 1, wherein each of the elastic portions is an elastic arm, and the elastic arm is connected between the supporting portion and the corresponding mass.

7. The accelerometer as recited in claim 6, wherein each of the masses at least partially surrounds the corresponding elastic arm.

8. The accelerometer as recited in claim 1, wherein each of the elastic portions has a plurality of sensing elements thereon, and each of the sensing elements is adapted to sense an elastic deformation of the corresponding elastic portion.

9. The accelerometer as recited in claim 8, wherein each of the sensing elements is a piezo-resistive element.

10. The accelerometer as recited in claim 8, wherein the sensing elements on each of the elastic portions are respectively adapted to sense the elastic deformation of the corresponding elastic portion with respect to a first movement direction, a second movement direction and a third movement direction, and the first movement direction, the second movement direction and the third movement direction are perpendicular to each other.

11. The accelerometer as recited in claim 8, wherein the sensing elements on one of the elastic portions are symmetrical to the sensing elements on another one of the elastic portions.