ACTIVE OPENING MEMS SWITCH DEVICE
First Claim
1. A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
a post on the substrate;
a microfabricated beam having an opening in a center portion thereof, the post being disposed within the opening; and
a hinge mechanically coupling the microfabricated beam to the post.
3 Assignments
0 Petitions
Accused Products
Abstract
Microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The beam, the hinges and the anchor may be made of the same material in some configurations. The switch can include electrodes, disposed on a surface of the substrate, for electrically controlling the orientation of the beam. The hinges may be thinner than the beam, resulting in the hinges being more flexible than the beam. In some configurations, the hinges are located within an opening in the beam. The hinges may extend in the same direction of the axis of rotation of the beam and/or in a direction perpendicular to the axis of rotation of the beam.
5 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) switch, comprising:
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a substrate; a post on the substrate; a microfabricated beam having an opening in a center portion thereof, the post being disposed within the opening; and a hinge mechanically coupling the microfabricated beam to the post. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating a microelectromechanical systems (MEMS) switch, comprising:
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fabricating a post on a substrate; fabricating a hinge coupled to the post; and fabricating a beam having an opening in a center portion thereof, the post being disposed within the opening and the beam being coupled to the post via the hinge. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A microelectromechanical systems (MEMS) switch, comprising:
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a substrate; a post on the substrate; a microfabricated beam having an opening in a center portion thereof, the post being disposed within the opening; and means for coupling the microfabricated beam to the post. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification