FUSE STRUCTURE HAVING MULTIPLE AIR DUMMY FUSES

• US 20170229395A1
• Filed: 06/29/2016
• Published: 08/10/2017
• Est. Priority Date: 02/04/2016
• Status: Active Grant

• Current Assignee: SK Hynix Inc.
• Original Assignee: SK Hynix Inc.
• Inventors: KIM, Jae-Hong, NAM, Seo-Woo
• Granted Patent: US 9,735,104 B1
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/7682 the dielectric comprising air gaps
• CPC Class Codes: H01L 23/522 including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 23/5283 Cross-sectional geometry
• CPC Class Codes: H01L 23/53228 the principal metal being copper
• CPC Class Codes: H01L 23/5329 Insulating materials
• CPC Class Codes: H01L 23/53295 Stacked insulating layers
• CPC Class Codes: H01L 28/00 Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor testing or measuring during manufacture H01L22/00; integration methods H01L21/70; integrated circuits H01L27/00; two-terminal components with a potential-jump or surface barrier H01L29/00; resistors in general H01C; inductors in general H01F; capacitors in general H01G
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps
• CPC Class Codes: H10B 20/25 One-time programmable ROM [OTPROM] devices, e.g. using electrically-fusible links

Abstract

A fuse structure includes a fusing line including a first portion, a second portion, and a central portion between the first portion and the second portion; and a dummy fuse neighboring the fusing line, the dummy fuse may include: a first air dummy fuse including a plurality of first air gaps extending in a first direction parallel to the fusing line; and a second air dummy fuse including a second air gap extending in a second direction crossing the fusing line.

Claims

1. A fuse structure comprising:

a fusing line including a first portion, a second portion, and a central portion between the first portion and the second portion; and

a dummy fuse neighboring the fusing line,

wherein the dummy fuse comprises;

a first air dummy fuse including a plurality of first air gaps extending in a first direction parallel to the fusing line; and

a second air dummy fuse including a second air gap extending in a second direction crossing the fusing line.

2. The fuse structure of claim 1, wherein the first air dummy fuse and the second air dummy fuse are disposed at the same level as the fusing line, and are disposed on both sides of the fusing line.

3. The fuse structure of claim 1, wherein the dummy fuse is disposed at a lower level than the fusing line, and overlaps with the fusing line.

4. The fuse structure of claim 1, wherein the dummy fuse is disposed at a level that is higher than the level of the fusing line, and overlaps with the fusing line.

5. The fuse structure of claim 1, wherein the second air gap is disposed on the same straight line as the central portion of the fusing line.

6. The fuse structure of claim 1, wherein the first air dummy fuse further includes a plurality of first non-air gaps between the plurality of first air gaps.

7. The fuse structure of claim 6, wherein the second air dummy fuse further includes a plurality of second non-air gaps which are arrayed in the second air gap.

8. The fuse structure of claim 7, wherein the first non-air gaps and the second non-air gaps have a dielectric constant higher than the first air gaps and the second air gap.

9. The fuse structure of claim 7, wherein the first non-air gaps and the second non-air gaps comprise a dielectric material.

10. The fuse structure of claim 7, wherein the first non-air gaps and the second non-air gaps comprise an ultra-low-k material.

11. The fuse structure of claim 1, wherein the first air gaps and the second air gap have elongated (line) elements, respectively.

12. The fuse structure of claim 11, wherein the first air gaps and the second air gap have widths smaller than the fusing line.

13. The fuse structure of claim 11, wherein the second air gap has a width larger than the first air gaps.

14. The fuse structure of claim 1, wherein the second air dummy fuse has an area smaller than the first air dummy fuse.

15. The fuse structure of claim 1, wherein the fusing line comprises copper.

16. The fuse structure of claim 1, wherein the dummy fuse is formed in an ultra-low-k material.