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FUSE STRUCTURE HAVING MULTIPLE AIR DUMMY FUSES

  • US 20170229395A1
  • Filed: 06/29/2016
  • Published: 08/10/2017
  • Est. Priority Date: 02/04/2016
  • Status: Active Grant
First Claim
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1. A fuse structure comprising:

  • a fusing line including a first portion, a second portion, and a central portion between the first portion and the second portion; and

    a dummy fuse neighboring the fusing line,wherein the dummy fuse comprises;

    a first air dummy fuse including a plurality of first air gaps extending in a first direction parallel to the fusing line; and

    a second air dummy fuse including a second air gap extending in a second direction crossing the fusing line.

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