×

DISPLAY DEVICE AND ELECTRONIC DEVICE INCLUDING THE DISPLAY DEVICE

  • US 20170229488A1
  • Filed: 04/24/2017
  • Published: 08/10/2017
  • Est. Priority Date: 05/10/2013
  • Status: Active Grant
First Claim
Patent Images

1. A method for forming a display device comprising the steps of:

  • forming a conductive layer over a substrate;

    forming a first electrode and a second electrode by patterning the conductive layer;

    forming a first insulating layer covering the first electrode and the second electrode;

    forming an oxide semiconductor layer over the first insulating layer;

    forming a first oxide semiconductor layer overlapping with the first electrode and a second oxide semiconductor layer overlapping with the electrode by patterning the oxide semiconductor layer;

    forming a source electrode and a drain electrode over and in contact with the first oxide semiconductor layer;

    forming an oxide insulating layer over and in contact with the first oxide semiconductor layer, the source electrode, and the drain electrode;

    forming a first opening in the oxide insulating layer, the first opening overlaps with the second oxide semiconductor layer and the second electrode; and

    forming a pixel electrode from the second oxide semiconductor layer,wherein the step of forming the pixel electrode comprises a step of;

    forming a second insulating layer containing hydrogen over and in contact with the second oxide semiconductor layer in the first opening,wherein the first oxide semiconductor layer serves as a channel formation region,wherein the second electrode, a portion of the first insulating layer, and a portion of the pixel electrode form a capacitor, andwherein the oxide semiconductor layer contains indium, zinc, and a metal element.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×