MEMS Automatic Alignment High-And-Low Comb Tooth and Manufacturing Method Thereof
First Claim
1. MEMS self-aligning high/low comb teeth, comprising movable comb teeth, fixed comb teeth, and a lifting structure with one end fixed to a substrate and the other end connected to the movable comb teeth or the fixed comb teeth, wherein, the lifting structure comprises at least one bent beam section and at least one straight beam section, the bent beam and the straight beam together form at least one bent folded beam structure, the bent beam makes the folded beam structure displace in the vertical direction, and thereby drives the movable comb teeth/fixed comb teeth connected to the lifting structure to displace out of the plane of the fixed comb teeth/movable comb teeth, forming high/low comb teeth.
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Abstract
A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.
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Citations
10 Claims
- 1. MEMS self-aligning high/low comb teeth, comprising movable comb teeth, fixed comb teeth, and a lifting structure with one end fixed to a substrate and the other end connected to the movable comb teeth or the fixed comb teeth, wherein, the lifting structure comprises at least one bent beam section and at least one straight beam section, the bent beam and the straight beam together form at least one bent folded beam structure, the bent beam makes the folded beam structure displace in the vertical direction, and thereby drives the movable comb teeth/fixed comb teeth connected to the lifting structure to displace out of the plane of the fixed comb teeth/movable comb teeth, forming high/low comb teeth.
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9. A method of manufacturing a MEMS self-aligning high/low comb teeth, comprising the steps of:
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employing a silicon wafer having a silicon-on-insulator (SOI) substrate including a front side and a back side; depositing a film layer on a monocrystalline silicon component layer on the front side of the SOI substrate, and patterning the film layer to form a second material layer for lifting structure, the second material layer also being a film layer; etching the back side of the SOI substrate by deep silicon etching, to form back cavities; etching the monocrystalline silicon component layer on the front side of the SOI substrate to form fixed or movable comb teeth and a first material layer for the lifting structure; bending locally a folded beam structure by virtue of the internal stress in the film layer, so that the lifting structure composed of the locally bent folded beam structure drives the fixed comb teeth or the movable comb teeth connected to the lifting structure to move in the vertical direction, and thereby forms self-aligning comb teeth. - View Dependent Claims (10)
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Specification