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INDUCTIVE PLASMA SOURCE AND PLASMA CONTAINMENT

  • US 20170236599A1
  • Filed: 01/12/2017
  • Published: 08/17/2017
  • Est. Priority Date: 03/07/2005
  • Status: Active Grant
First Claim
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1. A method of generating a plasma comprising the steps ofdistributing a neutral gas radially from a circumferentially oriented outlet of a nozzle over a coil of parallel wound wires coupled to a disc shaped body of a low inductance coil,energizing the coil of parallel wound wires to ionize the neutral gas into a plasma and eject the plasma from the low inductance coil.

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