VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
First Claim
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1. A substrate support, comprising:
- an inner portion arranged to support a substrate;
an edge ring surrounding the inner portion; and
a controller thatcalculates a desired pocket depth of the substrate support, wherein pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate, andbased on the desired pocket depth, selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
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Abstract
A substrate support includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and a controller that calculates a desired pocket depth of the substrate support. Pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate. Based on the desired pocket depth, the controller selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
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Citations
20 Claims
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1. A substrate support, comprising:
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an inner portion arranged to support a substrate; an edge ring surrounding the inner portion; and a controller that calculates a desired pocket depth of the substrate support, wherein pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate, and based on the desired pocket depth, selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of operating a substrate support, the method comprising:
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arranging a substrate on an inner portion of the substrate support; calculating a desired pocket depth of the substrate support, wherein pocket depth corresponds to a distance between an upper surface of an edge ring surrounding the inner portion and an upper surface of the substrate; and based on the desired pocket depth, selectively controlling an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification