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VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL

  • US 20170236741A1
  • Filed: 02/02/2017
  • Published: 08/17/2017
  • Est. Priority Date: 02/12/2016
  • Status: Active Grant
First Claim
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1. A substrate support, comprising:

  • an inner portion arranged to support a substrate;

    an edge ring surrounding the inner portion; and

    a controller thatcalculates a desired pocket depth of the substrate support, wherein pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate, andbased on the desired pocket depth, selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.

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