HIGH FREQUENCY, REPETITIVE, COMPACT TOROID-GENERATION FOR RADIATION PRODUCTION
First Claim
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1. A radiation source comprising:
- a gas source;
a confinement tube coupled with the gas source and configured to contain gas introduce into the confinement tube from the gas source; and
a resonant inductor having a plurality of windings around the confinement tube that is configured to ionize gas disposed within the confinement tube, generate a compact toroid within the ionized gas, and produce radiation from the compact toroid.
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Abstract
Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.
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Citations
19 Claims
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1. A radiation source comprising:
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a gas source; a confinement tube coupled with the gas source and configured to contain gas introduce into the confinement tube from the gas source; and a resonant inductor having a plurality of windings around the confinement tube that is configured to ionize gas disposed within the confinement tube, generate a compact toroid within the ionized gas, and produce radiation from the compact toroid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method comprising:
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ionizing a gas within a confinement chamber; generating a plurality of compact toroids from the ionized gas using a resonant inductor; and focusing radiation produced by each of the plurality of compact toroids to a target or an intermediate focus. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A method comprising:
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introducing gas into a confinement chamber; ionizing the gas within the confinement chamber; generating a first compact toroid from the ionized gas; focusing radiation produced by the first plurality of compact toroids to a target; ionizing the gas within the confinement chamber; generating a second compact toroid from the ionized gas; and focusing radiation produced by the second plurality of compact toroids to the target. - View Dependent Claims (17, 18, 19)
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Specification