DEPOSITION MASK, DEPOSITION DEVICE, DEPOSITION METHOD, AND DEPOSITION MASK MANUFACTURING METHOD
First Claim
1. The vapor deposition mask for forming a vapor-deposited film, in a matrix, on a target substrate, the vapor deposition mask comprising:
- a mask substrate; and
a magnetic material section provided on a first main surface of the mask substrate,the mask substrate including a plurality of apertures constituting (i) first aperture lines, each constituted by ones of the plurality of apertures which ones are lined up in a first direction and (ii) second aperture lines, each constituted by ones of the plurality of apertures which ones are lined up in a second direction orthogonal to the first direction,the magnetic material section being provided so as to be (iii) interposed between the first aperture lines and (iv) interposed between the second aperture lines,a first portion of the magnetic material, which first portion is interposed between the second aperture lines, having a first thickness and a second thickness which is less than the first thickness,the first thickness of the first portion being that of each sub-portion thereof which is positioned between mutually adjacent ones of the first aperture lines,the second thickness of the first portion being that of each sub-portion thereof which is positioned between ones of the plurality of apertures which ones are mutually adjacent in the first direction.
1 Assignment
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Accused Products
Abstract
A magnetic material section is provided on a mask substrate so as to be interposed between Y aperture lines of the mask substrate and between X aperture line of the mask substrate. A portion of the magnetic material section which portion is interposed between the X aperture lines has a first thickness and a second thickness which is less than the first thickness, the first thickness being that of each sub-portion thereof which is positioned between mutually adjacent ones of the Y aperture lines, the second thickness being that of each sub-portion thereof which is positioned between apertures which are mutually adjacent in a Y direction.
9 Citations
15 Claims
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1. The vapor deposition mask for forming a vapor-deposited film, in a matrix, on a target substrate, the vapor deposition mask comprising:
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a mask substrate; and a magnetic material section provided on a first main surface of the mask substrate, the mask substrate including a plurality of apertures constituting (i) first aperture lines, each constituted by ones of the plurality of apertures which ones are lined up in a first direction and (ii) second aperture lines, each constituted by ones of the plurality of apertures which ones are lined up in a second direction orthogonal to the first direction, the magnetic material section being provided so as to be (iii) interposed between the first aperture lines and (iv) interposed between the second aperture lines, a first portion of the magnetic material, which first portion is interposed between the second aperture lines, having a first thickness and a second thickness which is less than the first thickness, the first thickness of the first portion being that of each sub-portion thereof which is positioned between mutually adjacent ones of the first aperture lines, the second thickness of the first portion being that of each sub-portion thereof which is positioned between ones of the plurality of apertures which ones are mutually adjacent in the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. The method of producing a vapor deposition mask, comprising the steps of:
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(a) preparing a laminated body in which a magnetic material film is laminated onto a first main surface of a mask substrate; (b) forming a magnetic material section by etching the magnetic material film such that the magnetic material section includes main line sections, each of which is in the form of a stripe extending in a first direction, branch sections which extend, in parallel with a second direction orthogonal to the first direction, from each side of each of the main line sections, and island sections, each of which is provided so as to be (i) between ones of the branch sections which ones extend toward each other and (ii) separate from the main line sections and the branch sections, each of the island sections having a thickness which is less than that of (i) each of the branch sections and (ii) each portion of each of the main line sections which portion is positioned on a line passing through (i) one of the island sections and (ii) one of the branch sections adjacent to the one of the island sections; and (c) forming apertures such that each of the apertures is in a respective region surrounded by respective ones of the main line sections, the branch sections, and the island sections. - View Dependent Claims (13, 14)
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15. The method of producing a vapor deposition mask, comprising the steps of:
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(a) preparing a laminated body which includes, in the following order, a mask substrate, a first magnetic material film on a first main surface of the mask substrate, and a second magnetic material film; (b) etching the second magnetic material film such that the second magnetic material film has a matrix pattern in which non-continuous portions of the second magnetic material film are lined up in a first direction and in a second direction orthogonal to the first direction; and (c) forming apertures in respective positions such that each portion of the second magnetic material film, having been patterned, falls along a line passing diagonally through one of the apertures.
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Specification