METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SOURCE
First Claim
1. A system, comprising:
- a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner;
a vessel having an open end for loading, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace;
a crucible having an open end disposed within the vessel, the crucible being disposed within the vessel such that the open end of the crucible faces the open end of the vessel;
a closure device covering the open end of the vessel, the closure device configured to form a seal having vacuum and pressure capability;
a gas input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the gas input tube being positioned such that an input gas flowing into the vessel through the input tube is directed into the crucible;
a gas exhaust tube having a first end located outside the vessel and a second end in flow communication with an inside of the vessel;
a vacuum port having a first end located outside the vessel and a second end in flow communication with the inside of the vessel;
a gas supply network coupled in flow communication with the first end of the gas input tube;
a gas exhaust network coupled in flow communication with the first end of the gas exhaust tube; and
a vacuum network coupled in flow communication with the first end of the vacuum port.
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Accused Products
Abstract
A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
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Citations
30 Claims
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1. A system, comprising:
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a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner; a vessel having an open end for loading, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace; a crucible having an open end disposed within the vessel, the crucible being disposed within the vessel such that the open end of the crucible faces the open end of the vessel; a closure device covering the open end of the vessel, the closure device configured to form a seal having vacuum and pressure capability; a gas input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the gas input tube being positioned such that an input gas flowing into the vessel through the input tube is directed into the crucible; a gas exhaust tube having a first end located outside the vessel and a second end in flow communication with an inside of the vessel; a vacuum port having a first end located outside the vessel and a second end in flow communication with the inside of the vessel; a gas supply network coupled in flow communication with the first end of the gas input tube; a gas exhaust network coupled in flow communication with the first end of the gas exhaust tube; and a vacuum network coupled in flow communication with the first end of the vacuum port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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loading a target material in a crucible, the target material to be used in a droplet generator of an extreme ultraviolet (EUV) light source; inserting the loaded crucible into a vessel and sealing the vessel; melting the target material in the crucible; flowing a gas containing hydrogen over a free surface of the molten target material; measuring a concentration of water vapor in gas exiting the vessel; and after the measured concentration of water vapor in the gas exiting the vessel reaches a target condition, allowing the molten target material to cool. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An apparatus, comprising:
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a metal vessel having an open end and a closed end, the metal vessel having a cylindrical shape; a crucible disposed within the metal vessel, the crucible having an open end and a closed end, the crucible disposed within the metal vessel such that the open end of the crucible faces the open end of the metal vessel; a closure device covering the open end of the metal vessel, the closure device configured to form a seal having vacuum and pressure capability; an input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the input tube being positioned to direct an input gas flowing into the vessel through the input tube toward the crucible; and an exhaust tube having a first end located outside the metal vessel and a second end in flow communication with the inside of the metal vessel. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30)
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Specification