RELATIVE HUMIDITY SENSOR AND METHOD
First Claim
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1. A relative humidity sensor, comprising:
- a first electrode and a second electrode disposed above a dielectric substrate; and
a humidity sensitive layer disposed above at least one of the first electrode and the second electrode, the humidity sensitive layer comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler.
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Abstract
A relative humidity sensor is disclosed. The relative humidity sensor includes a first electrode and a second electrode disposed above a dielectric substrate. A humidity sensitive layer is disposed above at least one of the first electrode and the second electrode, where the humidity sensitive layer comprises a curable composition comprising cellulose acetate butyrate and a hydrophobic filler. In some embodiments, a dust protection layer is disposed above the humidity sensitive layer.
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Citations
16 Claims
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1. A relative humidity sensor, comprising:
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a first electrode and a second electrode disposed above a dielectric substrate; and a humidity sensitive layer disposed above at least one of the first electrode and the second electrode, the humidity sensitive layer comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of forming a relative humidity sensor, the method comprising:
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depositing a first electrode on a dielectric substrate; applying a composition to an upper surface of the first electrode to form a humidity sensitive layer, the composition comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler; depositing a second electrode on an upper surface of the humidity sensitive layer; and depositing a dust protection layer on an upper surface of the second electrode. - View Dependent Claims (15)
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16. A method of forming a relative humidity sensor, the method comprising:
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preparing a composition, the composition comprising a curable composition comprising cellulose acetate butyrate and a hydrophobic filler; and depositing at least a portion of the composition on a dielectric substrate supporting a first electrode and a second electrode, wherein the first and second electrode are interdigitated, to form the relative humidity sensor.
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Specification