Nanoscale Field-Emission Device and Method of Fabrication
First Claim
1. An apparatus including a first field-emission device, the first field-emission device comprising:
- a substrate;
a first electrode disposed on the substrate, the first electrode having a tip whose radius of curvature is at least 20 nm; and
a second electrode disposed on the substrate, the second electrode having a tip whose radius of curvature is at least 20 nm, wherein the first electrode and second electrode define a first gap having a first environment that is characterized by an ionization potential;
wherein the first gap has a first separation that enables field emission of electrons from one of the first electrode and second electrode with an electron energy that is less than the ionization potential.
1 Assignment
0 Petitions
Accused Products
Abstract
Nanoscale field-emission devices are presented, wherein the devices include at least a pair of electrodes separated by a gap through which field emission of electrons from one electrode to the other occurs. The gap is dimensioned such that only a low voltage is required to induce field emission. As a result, the emitted electrons energy that is below the ionization potential of the gas or gasses that reside within the gap. In some embodiments, the gap is small enough that the distance between the electrodes is shorter than the mean-free path of electrons in air at atmospheric pressure. As a result, the field-emission devices do not require a vacuum environment for operation.
5 Citations
31 Claims
-
1. An apparatus including a first field-emission device, the first field-emission device comprising:
-
a substrate; a first electrode disposed on the substrate, the first electrode having a tip whose radius of curvature is at least 20 nm; and a second electrode disposed on the substrate, the second electrode having a tip whose radius of curvature is at least 20 nm, wherein the first electrode and second electrode define a first gap having a first environment that is characterized by an ionization potential; wherein the first gap has a first separation that enables field emission of electrons from one of the first electrode and second electrode with an electron energy that is less than the ionization potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. An apparatus including a first field-emission device, the first field-emission device comprising:
-
a substrate; a first electrode disposed on the substrate, the first electrode having a first tip having a first radius of curvature that is at least 20 nm; and a second electrode disposed on the substrate, the second electrode having a second tip having a second radius of curvature that is at least 20 nm, wherein the first electrode and second electrode are co-planar and define a first gap having a first environment that is characterized by an ionization potential; wherein, when a first voltage is applied between them, the first and second electrodes generate a first in-plane, field-emission current of electrons having energy that is less than the ionization potential. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
-
-
19. A method comprising:
-
providing a first electrode on a substrate, the first electrode comprising a first material that is electrically conductive, wherein the first electrode has a first shape that is lithographically defined; and providing a second electrode on the substrate, the second electrode comprising a second material that is electrically conductive, wherein the second electrode has a second shape that is lithographically defined; wherein the first electrode and second electrode collectively define a first gap having an environment that is characterized by an ionization potential; and wherein the first and second electrodes are dimensioned and arranged such that they enable field emission of electrons from one of the first electrode and second electrode with an electron energy that is less than the ionization potential. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
-
Specification