ETCH METRIC SENSITIVITY FOR ENDPOINT DETECTION

• US 20170256463A1
• Filed: 03/02/2016
• Published: 09/07/2017
• Est. Priority Date: 03/02/2016
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Bailey, III, Andrew D., Tetiker, Mehmet Derya, Mills, Duncan W.
• Granted Patent: US 10,032,681 B2
• Time in Patent Office: Days
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 2210/56 Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
• CPC Class Codes: G06F 17/10 Complex mathematical operations function generation by table look-up G06F1/03; evaluation of elementary functions by calculation G06F7/544
• CPC Class Codes: G06F 30/20 Design optimisation, verification or simulation optimisation, verification or simulation of circuit designs G06F30/30
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

Monitoring a geometric parameter value for one or more features produced on a substrate during an etch process may involve: (a) measuring optical signals produced by optical energy interacting with features being etched on the substrate; (b) providing a subset of the measured optical signals, wherein the subset is defined by a range where optical signals were determined to correlate with target geometric parameter values for features; (c) applying the subset of optical signals to a model configured to predict the target geometric parameter values from the measured optical signals; (d) determining, from the model, a current value of the target geometric parameter of the features being etched; (e) comparing the current value of the target geometric parameter of the features being etched to an etch process endpoint value for the target geometric parameter; and (f) repeating (a)-(e) until the comparing in (e) indicates that the current value of the target geometric parameter of the features being etched has reached the endpoint value.

Claims

1. A method of generating a computational model that relates measured optical signals produced by optical energy interacting with features etched on a substrate to values of a target geometric parameter of the features etched on the substrate, the method comprising:

determining a range where the measured optical signals correlate less strongly with values of a non-target geometric parameter than with values of the target geometric parameter;

providing a training set having members with values of the optical signals in the range, wherein each member of the training set comprises (i) a value of the target geometric parameter of the features etched in the substrate, and (ii) an associated optical signal produced from etched features having the value of the target geometric parameter of the features etched in the substrate; and

producing the computational model from the training set.

2. The method of claim 1, wherein the members of the training set further comprise values of a non-target geometric parameter of the features etched in the substrate.

3. The method of claim 1, wherein the members of the training set are obtained experimentally.

4. The method of claim 1, wherein the members of the training set are generated computationally.

5. The method of claim 4, wherein the members of the training set are generated from a surface kinetic model and an optical modelling routine.

6. The method of claim 1, wherein the training set comprises at least about 50 members.

7. The method of claim 1, wherein producing the computational model from the training set comprises using a neural network or a regression technique.

8. The method of claim 1, wherein the target geometric parameter of the features etched on the substrate is an etch depth, a pitch, or an etch critical dimension.

9. The method of claim 1, wherein the optical signals comprise reflectance values produced from the features etched on the substrate.

10. The method of claim 1, wherein the range where the measured optical signals correlate less strongly with a non-target geometric parameter than with the target geometric parameter is a range of wavelengths.

11. The method of claim 1, wherein determining the range comprises determining variations in the range according to variations in correlation of the optical signals with the target geometric parameter for different values of the target geometric parameter.

12. A computational model configured to calculate values of a target geometric parameter for features etched on a substrate from measured optical signals produced by optical energy interacting with the features etched on the substrate, wherein the computational model was generated by the method of claim 1.

30. The method of claim 1, wherein the range defining the subset of measured optical signals in (b) is a range where the optical signals were determined to correlate less strongly with a non-target geometric parameter than the target geometric parameter.

13-22. -22. (canceled)

23. A method of monitoring or determining a geometric parameter value for one or more features produced on a substrate during an etch process, the method comprising:

(a) measuring optical signals produced by optical energy interacting with features being etched on the substrate;

(b) providing a subset of the measured optical signals, wherein the subset is defined by a range where optical signals were determined to correlate with values of a target geometric parameter for the features;

(c) applying the subset of optical signals to a model configured to predict the target geometric parameter values from the measured optical signals, wherein the model was generated by determining the range where optical signals were determined to correlate with target geometric parameter values for features;

(d) determining, from the model, a current value of the target geometric parameter of the features being etched;

(e) comparing the current value of the target geometric parameter of the features being etched to an etch process endpoint value for the target geometric parameter; and

(f) repeating (a)-(e) until the comparing in (e) indicates that the current value of the target geometric parameter of the features being etched has reached the endpoint value.

24. The method of claim 23, wherein the target geometric parameter of the features being etched is an etch depth, a pitch, or an etch critical dimension.

25. The method of claim 23, further comprising terminating the etch process when the comparing in (e) indicates that the current value of the target geometric parameter of the features being etched has reached the endpoint value.

26. The method of claim 23, wherein measuring optical signals produced in (a) comprises measuring reflectance produced from the features being etched on the substrate.

27. The method of claim 23, wherein the range defining the subset of measured optical signals in (b) is a range of wavelengths where the optical signals were determined, using a regression technique, to correlate with the target geometric parameter value for the features.

28. The method of claim 23, wherein the range defining the subset of measured optical signals in (b) varies between two repetitions of (a)-(e).

29. The method of claim 28, wherein the range defining the subset of measured optical signals in (b) was determined to vary according to variations in correlation of the optical signals with the target geometric parameter for different values of the target geometric parameter.

31. A system for etching one or more features on a substrate during an etch process, the system comprising:

an etching apparatus for etching semiconductor substrates; and

a controller for controlling the operation of the etching apparatus, the controller comprising non-transitory memory storing executable instructions for

(a) measuring optical signals produced by optical energy interacting with features being etched on the substrate;

(b) providing a subset of the measured optical signals, wherein the subset is defined by a range where optical signals were determined to correlate with values of a target geometric parameter for the features;

(c) applying the subset of optical signals to a model configured to predict the target geometric parameter values from the measured optical signals, wherein the model was generated by determining the range where optical signals were determined to correlate with target geometric parameter values for features;

(d) determining, from the model, a current value of the target geometric parameter of the features being etched;

(e) comparing the current value of the target geometric parameter of the features being etched to an etch process endpoint value for the target geometric parameter; and

(f) repeating (a)-(e) until the comparing in (e) indicates that the current value of the target geometric parameter of the features being etched has reached the endpoint value.

32. The system of claim 31, wherein the etching apparatus comprises:

a processing chamber;

a substrate holder for holding a substrate within the processing chamber;

a plasma generator for generating a plasma within the processing chamber, the plasma generator comprising an RF power supply;

one or more valve-controlled process gas inlets for flowing one or more process gases into the processing chamber; and

one or more gas outlets fluidically connected to one or more vacuum pumps for evacuating gases from the processing chamber.

34. The system of claim 31, wherein the controller further comprises instructions for terminating the etch process when the comparing in (e) indicates that the current value of the target geometric parameter of the features being etched has reached the endpoint value.

36. The system of claim 31, wherein the range defining the subset of measured optical signals in (b) is a range of wavelengths where the optical signals were determined, using a regression technique, to correlate with the target geometric parameter value for the features.

37. The system of claim 31, wherein controller further comprises instructions for varying the range defining the subset of measured optical signals in (b) between two repetitions of executing instructions for (a)-(e).

38. The system of claim 37, wherein the range defining the subset of measured optical signals in (b) was determined to vary according to variations in correlation of the optical signals with the target geometric parameter for different values of the target geometric parameter.

39. The system of claim 31, wherein the range defining the subset of measured optical signals in (b) is a range where the optical signals were determined to correlate less strongly with a non-target geometric parameter than the target geometric parameter.

33. (canceled)

35. (canceled)