NOZZLE DEVICE AND PROCESSING APPARATUS
First Claim
1. :
- A nozzle device comprising;
a first opening;
a plurality of second openings; and
a first duct part including at least one first branching part having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction, the first duct part connecting the first opening and the second openings, branched at least once by the first branching part in a path extending from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings, whereinthe cross-sectional area of the first end of the first part is smaller than the cross-sectional area of a second end of the first part.
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Accused Products
Abstract
A nozzle device according to an embodiment includes a first opening, a plurality of second openings, and a first duct part. The first duct part includes at least one first branching part having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction. The first duct part connects the first opening and the second openings and is branched at least once by the first branching part in a path extending from the first opening to the second openings. The path lengths and the numbers of first branching parts between the first opening and the respective second openings are the same. The cross-sectional area of the first end of the first part is smaller than the cross-sectional area of a second end of the first part.
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Citations
10 Claims
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1. :
- A nozzle device comprising;
a first opening; a plurality of second openings; and a first duct part including at least one first branching part having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction, the first duct part connecting the first opening and the second openings, branched at least once by the first branching part in a path extending from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings, wherein the cross-sectional area of the first end of the first part is smaller than the cross-sectional area of a second end of the first part. - View Dependent Claims (2, 3, 6, 7, 9, 10)
- A nozzle device comprising;
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4. :
- A nozzle device comprising;
a first opening; a plurality of second openings; and a first duct part including at least one first branching part having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction, the first duct part connecting the first opening and the second openings, branched at least once by the first branching part in a path extending from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings, wherein the second parts extend in directions intersecting with the first direction at an angle of smaller than 90 degrees.
- A nozzle device comprising;
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5. :
- A nozzle device comprising;
a first opening; a plurality of second openings; and a first duct part including at least one first branching part having a first part extending in a first direction, a plurality of second parts extending in respective directions intersecting with the first direction, a connecting part that connects a first end of the first part and the second parts, and a division part provided to the connecting part at a position facing the first end of the first part and recessed with respect to the first end, the first duct part connecting the first opening and the second openings, branched at least once by the first branching part in a path extending from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings.
- A nozzle device comprising;
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8. (canceled)
Specification