LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE HEAD MANUFACTURING METHOD

• US 20170282554A1
• Filed: 03/31/2017
• Published: 10/05/2017
• Est. Priority Date: 04/05/2016
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kato, Masataka, Takahashi, Tomohiro, Otaka, Shimpei
• Granted Patent: US 10,457,044 B2
• Time in Patent Office: Days
• CPC Class Codes: B41J 2/1404 Geometrical characteristics
• CPC Class Codes: B41J 2/14145 Structure of the manifold
• CPC Class Codes: B41J 2/1603 of the front shooter type
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating

Abstract

A liquid discharge head includes a plurality of recording element substrates each having an energy generating element configured to generate energy for discharging liquid from a discharge port, and a sealing member with which a surround of each of the plurality of recording element substrates is filled. Each of the plurality of recording element substrates includes a recessed portion formed on an end surface facing a neighboring recording element substrate, and in the recessed portion, a gap between neighboring recording element substrates is wider than a gap between element surfaces on which the energy generating element is provided.

Claims

1. A liquid discharge head comprising:

a plurality of recording element. substrates each having an energy generating element configured to generate energy for discharging liquid from a discharge port; and

a sealing member with which a surround of each of the plurality of recording element, substrates is filled,

wherein each of the plurality of recording element substrates includes a recessed portion on an end surface that faces neighboring recording element substrate, and in the recessed portion, a gap between neighboring recording element substrates is wider than a gap between element surfaces on which the energy generating element is provided.

2. The liquid discharge head according to claim 1, wherein. the recessed portion is opened at an end surface intersecting with the end surface on which the recessed portion is provided.

3. The liquid discharge head according to claim 1, wherein the recessed portion is communicated with a back surface of the element surface.

4. The liquid discharge head according to claim 1, wherein a hydrophilic film is formed at least at a part of the recessed portion.

5. The liquid discharge head. according to claim 4, wherein the hydrophilic film has wettability higher than wettability on a surface of the recording element substrate.

9. The liquid discharge head according to claim 1, wherein the recessed portion includes a portion that faces a neighboring recording element substrate and a portion that does not face a neighboring recording element substrate, and on a surface parallel to the element surface, a width of the recessed portion at the portion that faces the neighboring recording element substrate is wider than a width of the recessed portion at the portion that does not face the neighboring recording element substrate.

6. The liquid discharge head according to claim I, wherein the gap between neighboring recording element substrates is variable depending on a distance from a predetermined position on a surface parallel to the element surface.

7. The liquid discharge head. according to claim 6, wherein the predetermined position is an end portion where the end surface on which the recessed portion is provided intersects with another end surface, and the gap between neighboring recording element substrates becomes narrower as the distance from the predetermined position becomes longer.

8. The liquid. discharge head according to claim 6, wherein the predetermined position is two end portions where the end surface on which the recessed portion is provided intersects with another end surface, and the gap between neighboring recording element substrates becomes narrower as the distance from. a closer one of the two end portions becomes longer.

10. A method for manufacturing a liquid discharge head provided with a plurality of recording element substrates each having an energy generating element configured to generate energy for discharging liquid from a discharge port, the manufacturing method comprising:

dicing, as a first dicing, for forming a groove on the substrate, and

dicing, as a second dicing, for separating the substrate in the groove formed through the first dicing, with a width that is narrower than the groove, to form the recording element substrate.

11. The liquid discharge head manufacturing method according to claim 10, wherein the groove is formed with reactive ion etching in the first dicing.

12. The liquid discharge head manufacturing method according to claim 10, wherein the substrate is separated with laser dicing or blade dicing in the second dicing.

13. The liquid discharge head manufacturing method. according to claim 10, further comprising forming a hydrophilic film on a wall surface of the groove after completing of the first dicing and before starting of the second dicing.

14. The liquid discharge head manufacturing method according to claim 13, wherein the hydrophilic film has wettability higher than wettability on a surface of the recording element substrate.

15. A liquid discharge head comprising:

a plurality of recording element substrates each having an energy generating element configured to generate energy for discharging liquid from a discharge port; and

a sealing member with which a surround of each of the plurality of recording element substrates is filled, wherein a gap, between neighboring recording element substrates, on a back surface of an element surface on which the energy generating element is provided is wider than a gap, between the neighboring recording element substrates, on the element surface.