METHOD FOR CONTROLLING POSITION OF A LINEAR MEMS MIRROR WITH VARIABLE RESOLUTION AND/OR LIGHT INTENSITY
First Claim
1. A method for controlling an angular position of a MEMS mirror, comprising:
- applying a first driving moment to the MEMS mirror, applying the first driving moment generating a rotational scanning movement of the mirror; and
performing a zooming by applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra driving moment.
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Abstract
The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M2=k{dot over (θ)}2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.
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Citations
18 Claims
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1. A method for controlling an angular position of a MEMS mirror, comprising:
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applying a first driving moment to the MEMS mirror, applying the first driving moment generating a rotational scanning movement of the mirror; and performing a zooming by applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra driving moment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An optical device comprising:
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a MEMS mirror including a reflective structure and an actuator configured to apply driving moments to the reflective structure; and a processing unit, the processing unit including a speed controller configured to cause the actuator to apply to the reflective structure a first driving moment that generates a rotational scanning movement of the reflective structure; and
the speed controller being configured to cause the actuator to apply a second driving moment to the reflective structure at a zooming instant, wherein the second driving moment is equal to the first driving moment plus an extra driving moment. - View Dependent Claims (10, 11, 12, 13, 18)
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14. An optical device comprising:
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a MEMS mirror; and speed control means for applying a first driving moment to the MEMS mirror to generate a rotational scanning movement thereof, and for applying a second driving moment to the MEMS mirror at a zooming instant, wherein the second driving moment is equal to the first driving moment plus an extra driving moment. - View Dependent Claims (15, 16, 17)
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Specification