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METHOD FOR CONTROLLING POSITION OF A LINEAR MEMS MIRROR WITH VARIABLE RESOLUTION AND/OR LIGHT INTENSITY

  • US 20170285327A1
  • Filed: 09/29/2016
  • Published: 10/05/2017
  • Est. Priority Date: 03/30/2016
  • Status: Active Grant
First Claim
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1. A method for controlling an angular position of a MEMS mirror, comprising:

  • applying a first driving moment to the MEMS mirror, applying the first driving moment generating a rotational scanning movement of the mirror; and

    performing a zooming by applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra driving moment.

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