Micro-Transfer Printed LED and Color Filter Structure
3 Assignments
0 Petitions
Accused Products
Abstract
A micro-transfer printed intermediate structure comprises an intermediate substrate and one or more pixel structures disposed on the intermediate substrate. Each pixel structure includes an LED, a color filter, and a fractured pixel tether physically attached to the pixel structure. A fractured intermediate tether is physically attached to the intermediate substrate. A method of making an intermediate structure source wafer comprises providing a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors, disposing an intermediate substrate over the patterned sacrificial layer, and disposing one or more pixel structures on the intermediate substrate entirely on or over each sacrificial portion. Each pixel structure includes an LED, a color filter, and a fractured pixel tether physically attached to the pixel structure to form an intermediate structure.
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Citations
30 Claims
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1-3. -3. (canceled)
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4. A color-filter source wafer, comprising:
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a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors; a patterned color-filter layer including a color filter disposed entirely on or over each sacrificial portion; and one or more color-filter tethers physically connecting each color filter, or layers formed in contact with the color filter, to an anchor. - View Dependent Claims (5, 6)
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7. A method of making a color-filter source wafer, comprising:
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providing a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors; disposing a color filter layer on or over the wafer; and patterning a color filter entirely on or over each sacrificial portion. - View Dependent Claims (8, 9, 10)
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11-13. -13. (canceled)
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14. A pixel structure source wafer, comprising:
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a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors; an LED disposed entirely on or over each sacrificial portion, the LED having a light-emitting side; a color filter disposed adjacent to the light-emitting side of the LED, the color filter disposed entirely on or over each sacrificial portion; and one or more pixel tethers physically connecting each LED or color filter to an anchor. - View Dependent Claims (15, 16)
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17-24. -24. (canceled)
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25. An intermediate structure source wafer, comprising:
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a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors; a patterned intermediate substrate layer disposed on or over the patterned sacrificial layer forming separate and independent intermediate substrates, each intermediate substrate disposed entirely over a sacrificial portion; one or more pixel structures disposed entirely on each intermediate substrate, each pixel structure including an LED, the LED having a light-emitting side, and a color filter disposed adjacent to the light-emitting side of the LED; one or more fractured pixel tethers physically attached to each pixel structure; and an intermediate tether physically attached to the intermediate substrate or a layer on the intermediate substrate. - View Dependent Claims (26, 27, 28, 29)
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30-43. -43. (canceled)
Specification