×

Pressure Sensor, Differential Pressure Sensor, and Mass Flow Rate Control Device Using Same

  • US 20170299456A1
  • Filed: 10/06/2015
  • Published: 10/19/2017
  • Est. Priority Date: 10/07/2014
  • Status: Active Grant
First Claim
Patent Images

1. A pressure sensor comprising:

  • a diaphragm deforming by a pressure of a fluid;

    an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side; and

    a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to a center of the diaphragm and detecting a deformation of the elastic body working together with a deformation of the diaphragm as a strain,wherein the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×