Pressure Sensor, Differential Pressure Sensor, and Mass Flow Rate Control Device Using Same
First Claim
1. A pressure sensor comprising:
- a diaphragm deforming by a pressure of a fluid;
an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side; and
a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to a center of the diaphragm and detecting a deformation of the elastic body working together with a deformation of the diaphragm as a strain,wherein the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.
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Abstract
The present invention makes it possible to, even when a stainless steel is adopted in a diaphragm: prevent the diaphragm and a strain sensor from exfoliating from each other; be hardly susceptible to the influence of temperature in an operating environment; not allow the sensitivity of a pressure sensor to be dominated only by the mechanical characteristic of a material constituting the diaphragm; and increase the degree of freedom in design of members constituting the pressure sensor. A pressure sensor according to the present invention is, in order to solve the above problems, characterized in that: the pressure sensor has a diaphragm deforming by the pressure of a fluid, an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side, and a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to the center of the diaphragm and detecting the deformation of the elastic body working together with the deformation of the diaphragm as a strain; and the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.
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Citations
20 Claims
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1. A pressure sensor comprising:
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a diaphragm deforming by a pressure of a fluid; an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side; and a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to a center of the diaphragm and detecting a deformation of the elastic body working together with a deformation of the diaphragm as a strain, wherein the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 19)
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18. A differential pressure sensor comprising:
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a first diaphragm and a second diaphragm which are arranged so as to face each other and deforming by a pressure of a fluid; an elastic body being arranged between the first diaphragm and the second diaphragm and joining to the first diaphragm on one side and the second diaphragm on the other side; and a strain sensor being arranged on one side or the other side of the elastic body and on an end side apart from a position corresponding to a center of the first diaphragm and the second diaphragm and detecting a deformation of the elastic body working together with a deformation of the first diaphragm and the second diaphragm as a strain; and wherein the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor. - View Dependent Claims (20)
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Specification