Beam Alignment Method and Electron Microscope

• US 20170301507A1
• Filed: 03/07/2017
• Published: 10/19/2017
• Est. Priority Date: 03/08/2016
• Status: Active Grant

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Shimizu, Yuko, Yasuhara, Akira, Yamazaki, Kazuya, Hosokawa, Fumio
• Granted Patent: US 10,020,162 B2
• Time in Patent Office: Days
• CPC Class Codes: H01J 2237/1506 Tilting or rocking beam around an axis substantially at an angle to optical axis
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/223 Fourier techniques
• CPC Class Codes: H01J 2237/2802 Transmission microscopes
• CPC Class Codes: H01J 37/1471 for centering, aligning or positioning of ray or beam
• CPC Class Codes: H01J 37/1478 Beam tilting means, i.e. for stereoscopy or for beam channelling
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

Claims

The. The invention claimed is:

1. A beam alignment method of aligning the direction of incidence of an electron beam with a coma-free axis in an electron microscope, said method comprising the steps of:

tilting the electron beam in a first direction relative to a reference axis and obtaining a first TEM (transmission electron microscope) image;

tilting the electron beam in a second direction relative to the reference axis, the second direction being on the opposite side of the reference axis from the first direction, and obtaining a second TEM image; and

modifying the reference axis in such a way as to reduce the brightness of a differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

2. The beam alignment method as set forth in claim 1, wherein the tilt angle of said electron beam relative to said reference axis assumed when said first TEM image is obtained and the tilt angle of said electron beam relative to the reference axis assumed when said second TEM image is obtained are equal to each other in magnitude.

3. An electron microscope comprising:

a deflector for deflecting an electron beam to vary the direction of incidence of the electron beam relative to a sample;

a deflector controller for performing a first operation, in which the deflector is controlled such that the electron beam is tilted in a first direction relative to a reference axis, and a second operation, in which the deflector is controlled such that the electron beam is tilted in a second direction relative to the reference axis, the second direction being on the opposite side of the reference axis from the first direction;

a TEM image acquisition portion for obtaining a first TEM image and a second TEM image when the electron beam is tilted in the first direction and in the second direction, respectively;

a differential image generator for generating a differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image; and

a display controller for providing control to display the differential image on a display device.

4. The electron microscope as set forth in claim 3, wherein the tilt angle of said electron beam relative to said reference axis assumed when said first TEM image is obtained and the tilt angle of said electron beam relative to the reference axis assumed when said second TEM image is obtained are equal to each other in magnitude.

5. The electron microscope as set forth in claim 3, wherein said deflector controller repeatedly performs said first operation and said second operation.

6. The electron microscope as set forth in claim 3, further comprising a notification portion for giving notice to a user that the alignment is complete when the brightness of said differential image drops to or below a threshold value.

7. The electron microscope as set forth in claim 3, further comprising an incident direction determining portion for determining the direction of incidence of said electron beam;

wherein said deflector controller performs said first operation and said second operation at each of incremental tilt angles of said reference axis while incrementally varying the tilt angle of the reference axis relative to the sample,

wherein said TEM image acquisition portion obtains said first TEM image and said second TEM image at each of the incremental tilt angles of the reference axis,

wherein said differential image generator generates said differential image at each of the incremental tilt angles of the reference axis, and

wherein said incident direction determining portion determines the direction of incidence of said electron beam on the basis of the differential images generated at the incremental tilt angles of the reference axis.