SHAPING APPARATUS AND SHAPING METHOD

• US 20170304947A1
• Filed: 05/09/2017
• Published: 10/26/2017
• Est. Priority Date: 11/14/2014
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: SHIBAZAKI, Yuichi
• Application Number:
  US15/590,312
• Publication Number:
  US 20170304947A1
• Time in Patent Office: Days
• CPC Class Codes: B22F 10/25 Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS]
• CPC Class Codes: B22F 10/31 Calibration of process steps or apparatus settings, e.g. before or during manufacturing
• CPC Class Codes: B22F 12/22 Driving means
• CPC Class Codes: B22F 12/33 translatory in the deposition plane
• CPC Class Codes: B22F 12/37 Rotatable
• CPC Class Codes: B22F 12/44 characterised by the configuration of the radiation means
• CPC Class Codes: B22F 12/53 Nozzles
• CPC Class Codes: B22F 12/90 Means for process control, e.g. cameras or sensors
• CPC Class Codes: B22F 2203/03 for feed-back
• CPC Class Codes: B22F 2301/00 Metallic composition of the powder or its coating
• CPC Class Codes: B22F 2999/00 Aspects linked to processes or compositions used in powder metallurgy
• CPC Class Codes: B23K 2103/14 Titanium or alloys thereof
• CPC Class Codes: B23K 26/03 Observing, e.g. monitoring, the workpiece
• CPC Class Codes: B23K 26/032 using optical means
• CPC Class Codes: B23K 26/06 Shaping the laser beam, e.g. by masks or multi-focusing
• CPC Class Codes: B23K 26/0648 comprising lenses
• CPC Class Codes: B23K 26/0665 by beam condensation on the workpiece, e.g. for focusing
• CPC Class Codes: B23K 26/073 Shaping the laser spot
• CPC Class Codes: B23K 26/0734 into an annular shape
• CPC Class Codes: B23K 26/08 Devices involving relative movement between laser beam and workpiece
• CPC Class Codes: B23K 26/144 : the fluid stream containing particles, e.g. powder
• CPC Class Codes: B23K 26/1462 : Nozzles; Features related to nozzles
• CPC Class Codes: B23K 26/342 : Build-up welding
• CPC Class Codes: B23K 26/705 : Beam measuring device
• CPC Class Codes: B29C 64/153 : using layers of powder being selectively joined, e.g. by selective laser sintering or melting
• CPC Class Codes: B29C 64/268 : using laser beams; using electron beams [EB]
• CPC Class Codes: B29C 64/393 : for controlling or regulating additive manufacturing processes
• CPC Class Codes: B33Y 10/00 : Processes of additive manufacturing
• CPC Class Codes: B33Y 30/00 : Apparatus for additive manufacturing; Details thereof or accessories therefor
• CPC Class Codes: B33Y 50/02 : for controlling or regulating additive manufacturing processes
• CPC Class Codes: C22C 1/0458 : Alloys based on titanium, zirconium or hafnium
• CPC Class Codes: C22C 33/02 : by powder metallurgy working metallic powder B22F
• CPC Class Codes: Y02P 10/25 : Process efficiency

Abstract

This shaping apparatus is equipped with: a movement system which moves a target surface; a measurement system for acquiring position information of the target surface in a state movable by the movement system, a beam shaping system that has a beam irradiation section and a material processing section which supplies a shaping material irradiated by a beam from beam irradiation section; and a controller. On the basis of 3D data of a three-dimensional shaped object to be formed on a target surface and position information of the target surface acquired using the measurement system, the controller controls the movement system and the beam shaping system such that a target portion on the target surface is shaped by supplying the shaping material while moving the target surface and the beam from beam irradiation section relative to each other.

Claims

1. A shaping apparatus that forms a three-dimensional shaped object on a target surface, comprising:

a movement system that moves the target surface;

a measurement system that acquires position information of the target surface in a state movable by the movement system;

a beam shaping system that has a beam irradiation section which emits a beam and a material processing section which supplies shaping material to be irradiated by the beam from the beam irradiation section; and

a controller that controls the movement system and the beam shaping system based on 3D data of a three-dimensional shaped object which is to be formed on the target surface and position information of the target surface acquired using the measurement system, so that shaping is applied to the target portion on the target surface by supplying the shaping material from the material processing section while relatively moving the target surface and the beam from the beam irradiation section.

2. The shaping apparatus according to claim 1, wherein

the measurement system includes a three-dimensional measuring machine.

3. The shaping apparatus according to claim 1, wherein

the measurement system can measure position information of at least three points on the target surface.

4. The shaping apparatus according to claim 1, wherein

the measurement system can measure a three-dimensional shape of the target surface.

5. The shaping apparatus according to claim 1, wherein

the controller acquires position information of at least a part of a surface of a part added on the target surface by the shaping using the measurement system after the shaping.

6. The shaping apparatus according to claim 1, wherein

the movement system has a movable member which can hold a workpiece, and

the target surface includes at least a part of a surface of the workpiece held by the movable member.

7. The shaping apparatus according to claim 6, further comprising:

a carrier system that loads the workpiece before processing on the movable member and unloads the workpiece after processing from the movable member, wherein

the controller controls the carrier system.

8. The shaping apparatus according to claim 6, further comprising:

a sensor that receives the beam at a light receiving section provided at the movable member.

9. The shaping apparatus according to claim 6, wherein

the controller controls position and attitude of the movable member under a reference coordinate system, and

by acquiring the position information, the target surface is correlated with the reference coordinate system.

10. The shaping apparatus according to claim 6, wherein

the controller acquires position information of at least a part of a surface of a part added on the target surface of the workpiece by the shaping using the measurement system, while making the movable member hold the workpiece to which the shaping is applied.

11. The shaping apparatus according to claim 10, wherein

the controller acquires dimension error of the part added based on the position information acquired using the measurement system.

12. The shaping apparatus according to claim 11, wherein

the controller makes pass/fail decision of additive manufacturing using the dimension error.

13. The shaping apparatus according to claim 12, wherein

the controller applies corrective processing using the beam shaping system to the workpiece that resulted in failure on the pass/fail decision while the movable member remains holding the workpiece, based on the dimension error.

14. The shaping apparatus according to claim 13, wherein

the controller performs the corrective processing using a beam from the beam irradiation section.

15. The shaping apparatus according to claim 10, wherein

the controller controls the beam shaping system and the movement system based on the position information of at least a part of the surface of the part added, and applies shaping to a target portion on a target surface including the at least a part of a surface of the part added.

16. The shaping apparatus according to claim 10, wherein

the controller adjusts at least one of the measurement system, the beam shaping system, and the movement system based on the position information of at least a part of the surface of the part added.

17. The shaping apparatus according to claim 16, wherein

the controller acquires tendency of drift of the apparatus in the shaping based on the position information, and adjusts at least one of the measurement system, the beam shaping system, and the movement system in response to results acquired.

18. The shaping apparatus according to claim 1, further comprising:

a sensor that receives the beam at a light receiving section.

19. The shaping apparatus according to claim 18, wherein

the sensor can measure intensity distribution of the beam.

20. The shaping apparatus according to claim 18, wherein

the controller makes the sensor receive the beam at the light receiving section while moving the light receiving section of the sensor.

21. The shaping apparatus according to claim 18, wherein

the beam irradiation section has a condensing optical system which emits the beam, and

the light receiving section of the sensor can receive the beam emitted from the condensing optical system.

22. The shaping apparatus according to claim 21, wherein

the light receiving section is placed to receive the beam in one of a rear focal plane and near the rear focal plane of the condensing optical system.

23. The shaping apparatus according to claim 21, wherein

the light receiving section can receive the beam from the condensing optical system while moving in at least one of a direction parallel to an optical axis and a direction perpendicular to the optical axis on an exit side of the condensing optical system.

24. The shaping apparatus according to claim 21, wherein

the sensor can measure intensity distribution of the beam in a first plane perpendicular to the optical axis on the exit side of the condensing optical system.

25. The shaping apparatus according to claim 24, wherein

the first plane is one of the rear focal plane of the condensing optical system and a plane near the rear focal plane.

26. The shaping apparatus according to claim 24, wherein

the controller adjusts the intensity distribution of the beam in the first plane, based on a result of the measurement using the sensor.

27. The shaping apparatus according to claim 21, wherein

the controller adjusts an angle of at least one incident beam incident on a second plane perpendicular to an optical axis on an incidence plane side of the condensing optical system, based on the result of the measurement using the sensor.

28. The shaping apparatus according to claim 27, wherein

the second plane includes one of the front focal plane of the condensing optical system and a plane near the front focal plane.

29. The shaping apparatus according to claim 27, wherein

the at least one incident beam includes a plurality of beams having different incidence angles with respect to the second plane.

30. The shaping apparatus according to claim 18, wherein

the controller performs adjustment of at least one of the beam shaping system and the movement system, based on a result of measurement performed using the sensor.

31. The shaping apparatus according to claim 30, wherein

the adjustment of the beam shaping system based on the result of measurement performed using the sensor includes adjusting the material processing section.

32. The shaping apparatus according to claim 31, wherein

the adjusting the material processing section includes adjusting supply operation of the shaping material by the material processing section.

33. The shaping apparatus according to claim 31, wherein

the material processing section has at least one supply port to supply the shaping material, and

supply state of the shaping material from the at least one supply port is adjusted, based on the result of measurement performed using the sensor.

34. The shaping apparatus according to claim 33, wherein

the at least one supply port is movable, and

the at least one supply port is moved, based on the result of measurement performed using the sensor.

35. The shaping apparatus according to claim 33, wherein

the material processing section has a plurality of supply ports to supply the shaping material,

at least one supply port is selected from the plurality of supply ports, based on the result of measurement performed using the sensor, and

the shaping material is supplied from the at least one supply port that is selected.

36. The shaping apparatus according to claim 33, wherein

supply amount per unit time of the shaping material from the at least one supply port is adjustable.

37. The shaping apparatus according to claim 36, wherein

the controller determines the supply amount from the at least one supply port, based on the result of measurement performed using the sensor.

38. The shaping apparatus according to claim 1, wherein

the beam irradiation section has a condensing optical system which emits the beam, and

the controller adjusts intensity distribution of the beam in a first plane perpendicular to the optical axis on the exit plane side of the condensing optical system, based on measurement result of the measurement system.

39. The shaping apparatus according to claim 38, wherein

the first plane is one of the rear focal plane of the condensing optical system and a plane near the rear focal plane.

40. The shaping apparatus according to claim 38, wherein

the controller adjusts the intensity distribution of the beam in the first plane by adjusting an angle of at least one incident beam incident on a second plane perpendicular to an optical axis on an incidence plane side of the condensing optical system.

41. The shaping apparatus according to claim 40, wherein

the second plane includes one of the front focal plane of the condensing optical system and a plane near the front focal plane.

42. The shaping apparatus according to claim 40, wherein

the at least one incident beam includes a plurality of beams having different incidence angles with respect to the second plane.

43. The shaping apparatus according to claim 1, wherein

the adjustment of the beam shaping system based on the measurement result of the measurement system includes adjusting the beam irradiation section.

44. The shaping apparatus according to claim 1, wherein

the adjustment of the beam shaping system based on the measurement result of the measurement system includes adjusting the material processing section.

45. The shaping apparatus according to claim 44, wherein

the adjustment of the material processing section includes adjusting supply operation of the shaping material by the material processing section.

46. The shaping apparatus according to claim 44, wherein

the material processing section has at least one supply port to supply the shaping material, and

supply state of the shaping material from the at least one supply port is adjusted, based on the measurement result of the measurement system.

47. The shaping apparatus according to claim 46, wherein

the at least one supply port is movable, and

position of the at least one supply port is adjusted, based on the result of measurement performed using the sensor.

48. The shaping apparatus according to claim 46, wherein

the material processing section has a plurality of supply ports to supply the shaping material, and

at least one supply port is selected from the plurality of supply ports based on the measurement result of the measurement system, and the shaping material is supplied from the at least one supply port that is selected.

49. The shaping apparatus according to claim 46, wherein

supply amount per unit time of the shaping material from the at least one supply port is adjustable.

50. The shaping apparatus according to claim 49, wherein

the controller determines the supply amount from the at least one supply port, based on the measurement result of the measurement system.

51. The shaping apparatus according to claim 1, wherein

a molten pool of the shaping material is formed, by supplying the shaping material so that the shaping material is irradiated by the beam emitted from the beam irradiation section.

52. The shaping apparatus according to claim 51, wherein

shaping is applied to the target portion by relatively moving the target surface and the beam from the beam irradiation section while forming the molten pool on the target portion.

53. The shaping apparatus according to claim 1, wherein

the three-dimensional shaped object is made of a plurality of layers which are laminated, and

the controller controls the movement system and the beam shaping system, based on laminated cross section data for multiple layers acquired from 3D data of the three-dimensional shaped object.

54. A shaping method to form a three-dimensional shaped object on a target surface, comprising:

measuring position information of the target surface; and

applying shaping to a target portion on the target surface by supplying shaping material irradiated by the beam while relatively moving the target surface and a beam, based on 3D data of a three-dimensional shaped object to be formed on the target surface and the position information of the target surface that is measured.

55. The shaping method according to claim 54, wherein

in the measuring, three-dimensional position information of at least a part of the target surface is measured.

56. The shaping method according to claim 55, wherein

as the three-dimensional position information, three-dimensional shape of the target surface is measured.

57. The shaping method according to claim 54, wherein

the target surface includes at least a part of a surface of a workpiece held by a movable member whose position and attitude is controlled under a reference coordinate system, the method further comprising:

correlating position and attitude of the target surface with the reference coordinate system, based on the measured position information.

58. The shaping method according to claim 57, further comprising:

measuring position information of at least a part of the surface of the part added on the target surface by the shaping while keeping the workpiece to which the shaping is applied loaded on the movable member.

59. The shaping method according to claim 58, wherein

three-dimensional shape is measured as the position information of at least a part of the surface of the part added on the target surface by the shaping.

60. The shaping method according to claim 58, further comprising:

acquiring dimension error of the part added based on the position information that has been measured.

61. The shaping method according to claim 60, further comprising:

using the dimension error to make pass/fail decision of additive manufacturing.

62. The shaping method according to claim 61, further comprising:

applying corrective processing using the beam to the workpiece that resulted in failure on the pass/fail decision while the movable member remains holding the workpiece, based on the dimension error.

63. The shaping apparatus according to claim 58, wherein

shaping is applied to the target portion on the target surface including the at least a part of the surface of the part added, based on the position information of at least a part of the surface of the part added.

64. The shaping method according to claim 54, wherein

the target surface includes at least a part of the surface of the movable member whose position and attitude is controlled under a reference coordinate system, the method further comprising:

correlating position and attitude of the target surface with the reference coordinate system, based on the measured position information.

65. The shaping method according to claim 54, wherein

the three-dimensional shaped object is made of a plurality of layers which are laminated, and

applying the shaping to the target portion on the target surface is repeatedly performed for each layer, based on laminated cross section data for multiple layers acquired from 3D data of the three-dimensional shaped object.