CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

• US 20170309450A1
• Filed: 06/29/2017
• Published: 10/26/2017
• Est. Priority Date: 07/02/2014
• Status: Active Grant

• Current Assignee: NuFlare Technology, Inc. (Toshiba Corporation)
• Original Assignee: NuFlare Technology, Inc. (Toshiba Corporation)
• Inventors: MATSUMOTO, Hironobu
• Granted Patent: US 10,074,516 B2
• Time in Patent Office: Days
• CPC Class Codes: H01J 2237/31762 Computer and memory organisation
• CPC Class Codes: H01J 2237/31764 Dividing into sub-patterns
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography

Abstract

A charged particle beam writing apparatus includes a storage unit to store writing data of a region to be written in a target object, a first dividing unit to read the writing data and divide the region to be written into at least one first data processing region that overlaps with at least a first region where a pattern has been arranged, and at least one second data processing region that overlaps with a second region where no pattern is arranged without overlapping with the first region, a data processing unit to perform data processing of predetermined data processing contents for at least one first data processing region without performing the data processing for at least one second data processing region, and a writing unit to write a pattern on the target object, based on processed data.

Claims

1. A charged particle beam writing apparatus comprising:

a storage device configured to store writing data of a region to be written in a target object;

processing circuitry configured perform functions of

a dividing section that reads the writing data and divide the region to be written into a plurality of stripe regions each being in a strip shape;

a pattern existence determination section that determines, for each of the plurality of stripe regions, whether a pattern is arranged in a stripe region concerned in the plurality of stripe regions; and

a data processing section that performs data processing of predetermined data processing contents for stripe regions which have been determined to be with any pattern, without performing the data processing for a stripe region which have been determined to be without any pattern, in the plurality of stripe regions; and

a writing mechanism including a stage on which the target object is placed, a charged particle beam source, and a deflector and configured to write a pattern on the target object, based on processed data.

2. The apparatus according to claim 1, wherein the processing circuitry is further configured perform function of

a combining section that combines successive stripe regions which have been determined to be without any pattern, as one no-pattern stripe region in the plurality of stripe regions,

wherein the data processing section performs data processing of predetermined data processing contents for stripe regions which are not combined, without performing the data processing for the no-pattern stripe region.

3. A charged particle beam writing method comprising:

reading writing data of a region to be written in a target object, and dividing the region to be written into a plurality of stripe regions each being in a strip shape;

determining, for each of the plurality of stripe regions, whether a pattern is arranged in a stripe region concerned in the plurality of stripe regions;

performing data processing of predetermined data processing contents for stripe regions which have been determined to be with any pattern, without performing the data processing for a stripe region which have been determined to be without any pattern, in the plurality of stripe regions; and

writing a pattern on the target object, based on processed data.

4. The method according to claim 3, further comprising:

combining successive stripe regions which have been determined to be without any pattern, as one no-pattern stripe region in the plurality of stripe regions,

wherein when performing the data processing of predetermined data processing contents, data processing of predetermined data processing contents for stripe regions which are not combined is performed without performing the data processing for the no-pattern stripe region.