INTEGRATED INDUCTOR FOR INTEGRATED CIRCUIT DEVICES
First Claim
1. A method, comprising:
- forming a first turn of a first through-body-via-based inductor in a die having a back side and a front side of the die, the inductor first turn forming comprising;
forming first and second conductive through-body-vias passing through the body of the die from the front side of the die to the back side of the die, said first and second through-body-vias each having a front side end at the front side of the die and said first and second through-body-vias each having a back side end at the back side of the die.
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Accused Products
Abstract
A three-dimensional inductor is formed in an integrated circuit die using conductive through-body-vias which pass through the body of the die and contact one or more metal interconnect layers on the front side of the die and terminate on the back side of the die. In another embodiment, the through-body-vias may pass through a dielectric material disposed in a plug in the body of the die. In yet another aspect, a transformer may be formed by coupling multiple inductors formed using through-body-vias. In still another aspect, a three-dimensional inductor may include conductors formed of stacks of on chip metallization layers and conductive through-layer-vias disposed in insulation layers between metallization layers. Other embodiments are described.
8 Citations
15 Claims
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1. A method, comprising:
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forming a first turn of a first through-body-via-based inductor in a die having a back side and a front side of the die, the inductor first turn forming comprising; forming first and second conductive through-body-vias passing through the body of the die from the front side of the die to the back side of the die, said first and second through-body-vias each having a front side end at the front side of the die and said first and second through-body-vias each having a back side end at the back side of the die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15-42. -42. (canceled)
Specification