MICROMECHANICAL MOISTURE SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
First Claim
1. A micromechanical moisture sensor device, comprising:
- a substrate;
a first electrode device situated on the substrate;
a second electrode device situated on the substrate;
an electrical insulation device situated between the first electrode device and the second electrode device, which includes a first area which is in contact with the first electrode device and the second electrode device, and which includes a second area which is exposed by the first electrode device and the second electrode device;
a moisture-sensitive functional layer which is applied across the first electrode device and the second electrode device and the second area of the insulation device lying between them in such a way that it forms a moisture-sensitive resistive electrical shunt at least in some areas between the first electrode device and the second electrode device.
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical moisture-sensor device and a corresponding manufacturing method. The micromechanical moisture-sensor device is equipped with a first electrode device situated on the substrate; a second electrode device situated on the substrate; an electrical insulation device situated between the first electrode device and the second electrode device which includes a first area, which is in contact with the first electrode device and the second electrode device, and which includes a second area, which is exposed by the first electrode device and the second electrode device; a moisture-sensitive functional layer, which is applied across the first electrode device and the second electrode device and the second area of the insulation device lying between them in such a way that it forms a moisture-sensitive resistive electrical shunt at least in some areas between the first electrode device and the second electrode device.
11 Citations
12 Claims
-
1. A micromechanical moisture sensor device, comprising:
-
a substrate; a first electrode device situated on the substrate; a second electrode device situated on the substrate; an electrical insulation device situated between the first electrode device and the second electrode device, which includes a first area which is in contact with the first electrode device and the second electrode device, and which includes a second area which is exposed by the first electrode device and the second electrode device; a moisture-sensitive functional layer which is applied across the first electrode device and the second electrode device and the second area of the insulation device lying between them in such a way that it forms a moisture-sensitive resistive electrical shunt at least in some areas between the first electrode device and the second electrode device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method for manufacturing a micromechanical moisture sensor device, comprising:
-
providing a substrate; forming a first electrode device on the substrate; forming a second electrode device on the substrate; forming an electrical insulation device between the first electrode device and the second electrode device, which includes a first area which is in contact with the first electrode device and the second electrode device, and which includes a second area which is exposed by the first electrode device and the second electrode device; depositing a moisture-sensitive functional layer across the first electrode device and the second electrode device and the second area of the insulation device lying between them in such a way that it forms a moisture-sensitive resistive electrical shunt at least in some areas between the first electrode device and the second electrode device. - View Dependent Claims (11, 12)
-
Specification