GATE STRUCTURE HAVING DESIGNED PROFILE
First Claim
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1. A semiconductor structure, comprising:
- a substrate; and
a gate structure formed over the substrate;
wherein a sidewall of the gate structure has a top portion having a first inclination, a middle portion having a second inclination, and a bottom portion having a third inclination, and the first inclination, the second inclination, and the third inclination are different from one another.
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Abstract
Semiconductor structures are provided. The semiconductor structure includes a substrate and a gate structure formed over the substrate. In addition, a sidewall of the gate structure has a top portion having a first inclination, a middle portion having a second inclination, and a bottom portion having a third inclination, and the first inclination, the second inclination, and the third inclination are different from one another.
9 Citations
20 Claims
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1. A semiconductor structure, comprising:
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a substrate; and a gate structure formed over the substrate; wherein a sidewall of the gate structure has a top portion having a first inclination, a middle portion having a second inclination, and a bottom portion having a third inclination, and the first inclination, the second inclination, and the third inclination are different from one another. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor structure, comprising:
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a substrate; a metal gate structure formed over the substrate; and spacers formed on sidewalls of the metal gate structure, wherein the metal gate structure has a top portion, a middle portion, and a bottom portion, and the middle portion is wider than both the top portion and the bottom portion. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A semiconductor structure, comprising:
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a substrate; and a gate structure having curved sidewalls formed over the substrate; wherein each curved sidewall has a top portion, a middle portion, and a bottom portion, and an angle between the middle portion and the bottom portion of the curved sidewall measured from an inner side of the gate structure is smaller than 180°
. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification