MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE
First Claim
1. A device, comprising:
- a substrate;
an anchor attached to the substrate;
a first pair of sensing masses coupled to the anchor;
a second pair of sensing masses coupled to the anchor; and
a third pair of sensing masses coupled to the second pair of masses.
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Abstract
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.
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Citations
19 Claims
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1. A device, comprising:
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a substrate; an anchor attached to the substrate; a first pair of sensing masses coupled to the anchor; a second pair of sensing masses coupled to the anchor; and a third pair of sensing masses coupled to the second pair of masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A device, comprising:
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a substrate; an anchor attached to the substrate; a first pair of sensing masses coupled to the anchor aligned along a first axis; a second pair of sensing masses coupled to the first pair of sensing masses and aligned along the first axis, a first one of the second pair of sensing masses being separated from a second one of the second pair of sensing masses by the first pair of sensing masses. - View Dependent Claims (12, 13, 14, 15)
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16. A device, comprising:
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a substrate; an anchor attached to the substrate; a first pair of sensing masses coupled to the anchor and aligned along a first axis; a second pair of sensing masses coupled to the anchor and aligned along the first axis; and a third pair of sensing masses coupled to the second pair of masses. - View Dependent Claims (17, 18, 19)
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Specification