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MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE

  • US 20170322028A1
  • Filed: 07/19/2017
  • Published: 11/09/2017
  • Est. Priority Date: 05/11/2009
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a substrate;

    an anchor attached to the substrate;

    a first pair of sensing masses coupled to the anchor;

    a second pair of sensing masses coupled to the anchor; and

    a third pair of sensing masses coupled to the second pair of masses.

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