DIGITAL CONTROLLER FOR A MEMS GYROSCOPE
First Claim
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1. A digital control circuitry for a MEMS gyroscope, comprising:
- a digital primary loop circuitry configured to process a digitized primary signal, the digital primary loop circuitry comprisinga first analog-to-digital converter configured to digitize an analog primary input signal into the digitized primary signal, anda first infinite impulse filter configured to cause a −
90-degree phase shift of the digitized primary signal on a resonance frequency of a mechanical resonator of the MEMS gyroscope, the first digital infinite impulse response filter providing in its output a filtered digitized primary signal; and
a digital secondary loop circuitry configured to process a digitized secondary signal; and
a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the filtered digitized primary signal;
wherein the digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.
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Abstract
A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.
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Citations
17 Claims
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1. A digital control circuitry for a MEMS gyroscope, comprising:
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a digital primary loop circuitry configured to process a digitized primary signal, the digital primary loop circuitry comprising a first analog-to-digital converter configured to digitize an analog primary input signal into the digitized primary signal, and a first infinite impulse filter configured to cause a −
90-degree phase shift of the digitized primary signal on a resonance frequency of a mechanical resonator of the MEMS gyroscope, the first digital infinite impulse response filter providing in its output a filtered digitized primary signal; anda digital secondary loop circuitry configured to process a digitized secondary signal; and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the filtered digitized primary signal; wherein the digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification