Automated Replacement of Consumable Parts Using Interfacing Chambers

• US 20170330786A1
• Filed: 08/03/2017
• Published: 11/16/2017
• Est. Priority Date: 10/22/2015
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Genetti, Damon Tyrone, McChesney, Jon, Paterson, Alex, Witkowicki, Derek John, Ngo, Austin
• Granted Patent: US 10,304,717 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

Claims

1. A front opening ring pod (FORP) for holding consumable parts used in a processing tool, comprising:

a plurality of compartments for holding consumable parts in a vertically stacked orientation within the FORP;

a plurality of ledges disposed along internal sidewalls of the FORP provide shelves for supporting the consumable parts in the vertically stacked orientation;

a separator plate disposed within the FORP, providing a horizontal plane that divides an inside region of the FORP into an upper region and a lower region, such that each of the upper region and the lower region include a group of said shelves for holding the consumable parts; and

a vent defined in a base of the FORP, the vent provides a path for gases out of the lower region of the FORP.

2. The FORP of claim 1, wherein a sidewall of the FORP includes an opening with a door frame, the opening is configured to receive a door, and the opening is sized to provide access in and out for the consumable parts.

3. The FORP of claim 1, wherein the upper region is configured to store consumable parts that are to be delivered to one or more process modules of the processing tool, and the lower region is configured to store consumable parts retrieved from the one or more process modules of the processing tool.

4. The FORP of claim 1, wherein the FORP is defined by a molded plastic shell.

5. The FORP of claim 4, wherein the plurality of ledges are disposed within the internal sidewalls of the molded plastic shell of the FORP.

6. The FORP of claim 1, wherein each of the consumable parts is an edge ring that is configured to surround a substrate support of one or more process modules of the processing tool.

7. The FORP of claim 1, wherein the FORP is configured to be interfaced with a load port that couples to an atmospheric transfer module of the processing tool.

8. The FORP of claim 1, further includes a carrier plate receiving structure defined on a top surface of the separator plate, the carrier plate receiving structure configured to store a carrier plate used to move the consumable parts into and out of the FORP.

9. The FORP of claim 8, wherein the group of said shelves along the internal sides of the upper region are disposed starting at a height that is greater than a height of the carrier plate receiving structure.

10. The FORP of claim 8, further includes a second carrier plate receiving structure defined on a top surface of the base, the second carrier plate receiving structure configured to store a second carrier plate used to move the consumable parts into the FORP.

11. The FORP of claim 10, wherein the group of said shelves along the internal sides of the lower region are disposed starting at a height that is greater than a height of the second carrier plate receiving structure.

12. A front opening ring pod (FORP) for holding consumable parts used in a processing tool, comprising:

a plurality of compartments for holding consumable parts in a vertically stacked orientation within the FORP;

a plurality of ledges disposed vertically along internal lateral sidewalls and an internal back sidewall of the FORP, defining shelves for supporting the consumable parts in the vertically stacked orientation;

an opening with a door frame provided on a front sidewall of the FORP, the opening is configured to receive a door, the opening is sized to provide access in and out for the consumable parts held in the FORP;

a separator plate disposed within the FORP, provides a horizontal plane that divides an inside region of the FORP into an upper region and a lower region, wherein each of the upper region and the lower region include a group of said shelves for holding the consumable parts; and

a vent defined in a base of the FORP, the vent provides a path for gases out of the lower region of the FORP.

13. The FORP of claim 12, wherein the door includes a plurality of ledges disposed vertically along an inside wall, the plurality of ledges defining shelves for providing additional support to the consumable parts received in the vertically stacked orientation, when the door is engaged, the plurality of ledges of the door aligning with the plurality of ledges disposed along the internal lateral sidewalls and the internal back sidewall.

14. The FORP of claim 12, wherein each of the consumable parts is an edge ring that is configured to surround a substrate support of one or more process modules of the processing tool.

15. The FORP of claim 12, wherein the back sidewall of the FORP is contoured, wherein the contour is defined by a back portion that is oriented parallel to the front sidewall of the FORP and an angled portion extending between each of the lateral sidewalls and the back portion.

16. The FORP of claim 12, further includes a carrier plate receiving structure disposed in the upper region used to store consumable parts that are to be delivered to one or more process modules within the processing tool, the carrier plate receiving structure configured to store a carrier plate used to move the consumable parts out of the FORP.

17. The FORP of claim 16, wherein the carrier plate receiving structure is disposed on a top surface of the separator plate or on an underside of a top surface of the FORP.

18. The FORP of claim 16, further includes a second carrier plate receiving structure disposed in the lower region used to store consumable parts that are retrieved from the one or more process modules, the second carrier plate receiving structure configured to store a second carrier plate used to move the consumable parts into the FORP.

19. The FORP of claim 18, wherein the second carrier plate receiving structure is disposed on a top surface of the base of the FORP or on an underside surface of the separator plate.

20. The FORP of claim 12, wherein the FORP is defined by a molded plastic shell, and wherein the plurality of ledges is disposed within the internal lateral sidewalls and the internal back sidewall of the molded plastic shell of the FORP.