×

Automated Replacement of Consumable Parts Using Interfacing Chambers

  • US 20170330786A1
  • Filed: 08/03/2017
  • Published: 11/16/2017
  • Est. Priority Date: 10/22/2015
  • Status: Active Grant
First Claim
Patent Images

1. A front opening ring pod (FORP) for holding consumable parts used in a processing tool, comprising:

  • a plurality of compartments for holding consumable parts in a vertically stacked orientation within the FORP;

    a plurality of ledges disposed along internal sidewalls of the FORP provide shelves for supporting the consumable parts in the vertically stacked orientation;

    a separator plate disposed within the FORP, providing a horizontal plane that divides an inside region of the FORP into an upper region and a lower region, such that each of the upper region and the lower region include a group of said shelves for holding the consumable parts; and

    a vent defined in a base of the FORP, the vent provides a path for gases out of the lower region of the FORP.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×