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Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System

  • US 20170334074A1
  • Filed: 08/02/2017
  • Published: 11/23/2017
  • Est. Priority Date: 10/22/2015
  • Status: Active Grant
First Claim
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1. An end-effector connectable to a robot for use with a processing tool, comprising:

  • a finger assembly defined from a plate that includes a base and a pair of fingers that extend outward from the base, each of the pair of fingers includes a proximal end adjacent to the base where the finger assembly is coupled to an arm of the robot and a distal end is at tips of the pair of fingers;

    a first set of contact pads disposed on a top surface of the finger assembly at the base and at the distal end of the pair of fingers, such that the first set of contact pads define an outer diameter, the first set of contact pads used to support a consumable part, when handled by the finger assembly;

    a second set of contact pads disposed on the top surface of the finger assembly at the proximal end adjacent to the base and near the distal end, such that the second set of contact pads define an inner diameter, the second set of contact pads is used to support a substrate, when handled by the finger assembly,wherein the outer diameter is disposed concentric to the inner diameter, and wherein the first set of contact pads provides a contact surface that is distinct from a contact surface provided by the second set of contact pads.

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