ANGULAR RATE SENSOR
First Claim
1. A MEMS sensor for measuring rotational motion about a first axis, comprising:
- a frame;
a base structure under the frame;
a drive mass mounted in the frame for rotational movement about a second axis perpendicular to the first axis;
a first drive paddle in the drive mass;
a first link including;
a first end coupled to a first spring, wherein the first spring movably couples the first drive paddle to the drive mass, anda second end coupled to a second spring, wherein the second spring movably couples the first link to the frame; and
a drive system including an electrode aligned to exert electromotive force to pivot the first drive paddle and move the drive mass about the second axis, and deflection of the drive mass is greater than deflection of the first drive paddle when the drive system is operating.
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Accused Products
Abstract
A MEMS sensor for measuring rotational motion about a first axis includes a frame, a base structure under the frame, a drive mass mounted in the frame for rotational movement about a second axis perpendicular to the first axis, and a first drive paddle in the drive mass. A first link includes a first end coupled to a first spring that movably couples the first drive paddle to the drive mass and a second end coupled to a second spring that movably couples the first link to the frame. A drive system includes an electrode aligned to exert electromotive force to pivot the first drive paddle and move the drive mass about the second axis. Deflection of the drive mass is greater than deflection of the first drive paddle when the drive system is operating.
2 Citations
20 Claims
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1. A MEMS sensor for measuring rotational motion about a first axis, comprising:
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a frame; a base structure under the frame; a drive mass mounted in the frame for rotational movement about a second axis perpendicular to the first axis; a first drive paddle in the drive mass; a first link including; a first end coupled to a first spring, wherein the first spring movably couples the first drive paddle to the drive mass, and a second end coupled to a second spring, wherein the second spring movably couples the first link to the frame; and a drive system including an electrode aligned to exert electromotive force to pivot the first drive paddle and move the drive mass about the second axis, and deflection of the drive mass is greater than deflection of the first drive paddle when the drive system is operating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A transducer adapted to sense rotation about a first axis comprising:
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a drive mass mounted to rotate about a second axis; a first drive paddle; a second drive paddle; a frame around a periphery of the drive mass; a first link having a first spring coupled to the drive mass and the first drive paddle on one end and having a second spring coupled to the frame on another end, wherein the first drive paddle and the first link are on one side of the second axis; a second link having a third spring coupled to the drive mass and the second drive paddle on one end and having a fourth spring coupled to the frame on another end, wherein the second drive paddle and the second link are on another side of the second axis. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A method of making a transducer adapted to sense rotation about a first axis comprising:
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forming a base structure including first and second cavities; forming a rigid, planar drive mass using a conductive material; separating first and second drive paddles from the drive mass in respective areas on respective opposite sides of a second axis of rotation of the drive mass; forming movable links between the first and second drive paddles and edges of the drive mass at the respective areas of the first and second drive paddles; anchoring the drive mass to the base structure so that one outer edge of the drive mass is in the first cavity when the drive mass rotates in a first direction, and an opposite outer edge of the drive mass is in the second cavity when the drive mass rotates in an opposite direction. - View Dependent Claims (20)
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Specification