AIR PRESSURE SENSING SYSTEM AND AIR PRESSURE SENSING METHOD
First Claim
1. An air pressure sensing system, comprising a first sensing unit and a second sensing unit, wherein the first sensing unit comprises:
- a substrate, having a cavity connected with an exterior environment;
a diaphragm, movably and deformably disposed at the substrate and suspended in the cavity; and
a supporting member, disposed between the substrate and the diaphragm, wherein an electrostatic force is provided between the substrate and the diaphragm to drive the diaphragm, such that a portion of the semiconductor layer structure, the supporting member and the diaphragm are contacted with each other and a closed space is formed in the cavity, the exterior environment and the closed space are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the exterior environment and the closed space.
1 Assignment
0 Petitions
Accused Products
Abstract
An air pressure sensing system including a first sensing unit and a second sensing unit is provided. The first sensing unit includes a substrate, a diaphragm, and a supporting member. The substrate has a cavity connected with an exterior environment. The diaphragm is movably and deformably disposed at the substrate and suspended in the cavity. An electrostatic force is provided to the substrate and the diaphragm to move the diaphragm, such that a portion of the base, the supporting member and the diaphragm are contacted with each other and a closed space is formed therebetween in the cavity. The closed space and the exterior environment are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the closed space and the exterior environment. An air pressure sensing method is also provided.
-
Citations
15 Claims
-
1. An air pressure sensing system, comprising a first sensing unit and a second sensing unit, wherein the first sensing unit comprises:
-
a substrate, having a cavity connected with an exterior environment; a diaphragm, movably and deformably disposed at the substrate and suspended in the cavity; and a supporting member, disposed between the substrate and the diaphragm, wherein an electrostatic force is provided between the substrate and the diaphragm to drive the diaphragm, such that a portion of the semiconductor layer structure, the supporting member and the diaphragm are contacted with each other and a closed space is formed in the cavity, the exterior environment and the closed space are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the exterior environment and the closed space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. An air pressure sensing method, adapted to an air pressure sensing system comprising a first sensing unit and a second sensing unit, wherein a sensing accuracy of the first sensing unit is greater than a sensing accuracy of the second sensing unit, and a sensing range of the second sensing unit is greater than a sensing range of the first sensing unit, the air pressure sensing method comprising:
-
activating the second sensing unit; and activating the first sensing unit at a first timing, and deactivating the first sensing unit at a second timing during an operation period of the second sensing unit. - View Dependent Claims (12, 13, 14, 15)
-
Specification