GAS DETECTION DEVICE
First Claim
1. A gas detection device comprising:
- a substrate having a main surface; and
a movable film structure located on, and including a portion thereof spaced from, the main surface of the substrate, the portion of the movable film structure located over and spaced from the substrate including a first film formed of an insulating material, a patterned second film which deforms as a result of absorbing or adsorbing a predetermined gas, and a patterned third film comprising a resistive heater, at least a portion of the movable film structure spaced from the substrate being movable with respect to the substrate;
wherein from the perspective of a direction perpendicular to the main surface of the substrate, at least a portion of a pattern of the second film overlaps at least a portion of a pattern of the third film.
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Accused Products
Abstract
A gas detection device includes a substrate having a main surface and a movable film structure located on, and including a portion thereof spaced from, the main surface of the substrate. The portion of the movable film structure located over and spaced from the substrate includes a first film formed of an insulating material, a patterned second film which deforms as a result of absorbing or adsorbing a predetermined gas, and a patterned third film comprising a resistive heater, at least a portion of the movable film structure spaced from the substrate being movable with respect to the substrate. From the perspective of a direction perpendicular to the main surface of the substrate, at least a portion of a pattern of the second film overlaps at least a portion of a pattern of the third film.
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Citations
20 Claims
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1. A gas detection device comprising:
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a substrate having a main surface; and a movable film structure located on, and including a portion thereof spaced from, the main surface of the substrate, the portion of the movable film structure located over and spaced from the substrate including a first film formed of an insulating material, a patterned second film which deforms as a result of absorbing or adsorbing a predetermined gas, and a patterned third film comprising a resistive heater, at least a portion of the movable film structure spaced from the substrate being movable with respect to the substrate; wherein from the perspective of a direction perpendicular to the main surface of the substrate, at least a portion of a pattern of the second film overlaps at least a portion of a pattern of the third film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A gas detection device comprising:
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a substrate; and a movable film structure, a portion of which is located over, and spaced from the substrate, the portion of the movable film structure located over and spaced from the substrate including a first insulating film, and a second resistive heating film, the second film being deformed in the presence of the predetermined gas. - View Dependent Claims (10, 11, 12, 13)
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14. A gas detection device comprising:
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a substrate; and a movable film structure, a portion of which extends over and is spaced from the substrate, the movable film structure including a first film formed of a brittle material, and a second film formed of a hydrogen absorbing material. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification