ACCELERATION SENSOR HAVING A REDUCED BIAS AND MANUFACTURING METHOD FOR AN ACCELERATION SENSOR
First Claim
1. An acceleration sensor comprising:
- an excitation mass having excitation electrodes, which excitation mass is mounted moveably along a movement axis (x) above a substrate;
detection electrodes that are fixedly connected to the substrate and that correspond to the excitation electrodes;
whereina first group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a first direction;
a second group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a second direction that is opposite to the first direction;
the number of pairings in the first group is equal to the number of parings in the second group;
the excitation electrodes and the detection electrodes of the first group of pairings and of the second group of pairings are arranged such that the averaged distance between excitation electrodes and detection electrodes of pairings of the first group corresponds to the averaged distance between excitation electrodes and detection electrodes of pairings of the second group;
the first group comprises at least two subgroups of pairings;
the second group comprises at least two subgroups of pairings in the subgroups excitation electrodes and detection electrodes are arranged alternatingly;
a virtual first connecting line between centers of the two subgroups of the first group crosses a virtual second connection line between centers of the two subgroups of the second group.
1 Assignment
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Accused Products
Abstract
The invention relates to an acceleration sensor (400) comprising an excitation mass (420) having excitation electrodes (430), which excitation mass is movably mounted over a substrate (410) along a movement axis (x) and comprising detection electrodes (440) which are permanently connected to the substrate (410) and allocated to the excitation electrodes (430). A first group of pairings (450) of excitation electrode (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a first direction (460). A second group of pairings (450) of excitation electrodes (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a second direction (465), which is opposite the first direction (460). The number of pairings (450) in the first group is equal to the number of pairings (450) in the second group. The averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the first group corresponds to the averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the second group.
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Citations
8 Claims
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1. An acceleration sensor comprising:
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an excitation mass having excitation electrodes, which excitation mass is mounted moveably along a movement axis (x) above a substrate; detection electrodes that are fixedly connected to the substrate and that correspond to the excitation electrodes;
whereina first group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a first direction; a second group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a second direction that is opposite to the first direction; the number of pairings in the first group is equal to the number of parings in the second group; the excitation electrodes and the detection electrodes of the first group of pairings and of the second group of pairings are arranged such that the averaged distance between excitation electrodes and detection electrodes of pairings of the first group corresponds to the averaged distance between excitation electrodes and detection electrodes of pairings of the second group; the first group comprises at least two subgroups of pairings; the second group comprises at least two subgroups of pairings in the subgroups excitation electrodes and detection electrodes are arranged alternatingly; a virtual first connecting line between centers of the two subgroups of the first group crosses a virtual second connection line between centers of the two subgroups of the second group. - View Dependent Claims (4, 5, 6, 7)
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2. (canceled)
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3. (canceled)
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8. A method for manufacturing an acceleration sensor comprising the steps:
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forming of an excitation mass having excitation electrodes, which excitation mass is mounted moveably along a movement axis (x) above a substrate; forming of detection electrodes that are fixedly connected with the substrate and that correspond to the excitation electrodes;
whereinthe steps comprise; forming of a first group of pairings of excitation electrodes and corresponding detection electrodes that is configured to deflect the excitation mass along the movement axis (x) in a first direction; forming of a second group of pairings of excitation electrodes and corresponding detection electrodes that is configured to deflect the excitation mass along the movement axis (x) in a second direction that is opposite to the first direction, wherein the number of pairings in the first group is equal to the number of parings in the second group; the excitation electrodes and the detection electrodes of the first group of pairings and of the second group of pairings are formed such that the averaged distance between excitation electrodes and detection electrodes of pairings of the first group corresponds to the averaged distance between excitation electrodes and detection electrodes of the pairings of the second group; the first group comprises at least two subgroups of pairings; the second group comprises at least two subgroups of pairings; in the subgroups, excitation electrodes and detection electrodes are arranged alternatingly; a virtual first connecting line between centers of the two subgroups of the first group crosses a virtual second connection line between centers of the two subgroups of the second group.
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Specification