INSPECTING APPARATUS
First Claim
1. An inspection apparatus comprising:
- a holder configured to set an inspection target thereon, the inspection target configured to detect a contact position on the inspection target touched by a human finger;
at least one pseudo finger configured to be detected as the human finger upon contact with the inspection target;
a positioner configured to move the at least one pseudo finger relative to the inspection target and to change the contact position of the at least one pseudo finger relative to the inspection target;
a memory configured to store, respectively, a value of a pressing force in a range of pressing forces said range including a zero pressing force for each of the at least one pseudo finger on the inspection target;
a controller configured to regulate the pressing force for at least one pseudo finger of the at least one pseudo finger based on the respective value; and
a sensor configured to acquire an electric signal output from the inspection target.
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Accused Products
Abstract
An inspection apparatus is provided with a holder configured to set an inspection target thereon, the inspection target configured to detect a contact position on the inspection target touched by a human finger; pseudo finger(s) configured to be detected as the human finger upon contact with the inspection target; a positioner configured to move the pseudo finger(s) relative to the inspection target and to change the contact position of the pseudo finger(s) relative to the inspection target; a memory configured to store, respectively, a value of a pressing force in a range of pressing forces said range including a zero pressing force for each of the pseudo finger(s) on the inspection target; a controller configured to regulate the pressing force for pseudo finger(s) of the pseudo finger(s) based on the respective value; and a sensor configured to acquire an electric signal output from the inspection target.
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Citations
20 Claims
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1. An inspection apparatus comprising:
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a holder configured to set an inspection target thereon, the inspection target configured to detect a contact position on the inspection target touched by a human finger; at least one pseudo finger configured to be detected as the human finger upon contact with the inspection target; a positioner configured to move the at least one pseudo finger relative to the inspection target and to change the contact position of the at least one pseudo finger relative to the inspection target; a memory configured to store, respectively, a value of a pressing force in a range of pressing forces said range including a zero pressing force for each of the at least one pseudo finger on the inspection target; a controller configured to regulate the pressing force for at least one pseudo finger of the at least one pseudo finger based on the respective value; and a sensor configured to acquire an electric signal output from the inspection target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An inspection apparatus comprising:
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a holder configured to set an inspection target thereon, the inspection target configured to detect a first change from a no-contact condition to a contact condition on the inspection target by a human finger and/or a second change from the contact condition to the no-contact condition on the inspection target by the human finger; one or more pseudo fingers, each configured be detected as the human finger by the inspection target; a memory configured to store, respectively, a value of a pressing force in a range of pressing forces said range including a zero pressing force for each of the one or more pseudo fingers; a positioner configured to linearly move at least one of the one or more pseudo fingers in a Z-direction, toward and/or away from the inspection target; a controller configured to regulate the pressing force for the at least one pseudo finger by controlling the positioner based on the respective value; and a sensor configured to acquire from the inspection target a first electric signal output indicating the first change and/or a second electrical signal output indicating the second change. - View Dependent Claims (19, 20)
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Specification