SUBSTRATE HOLDING DEVICE
First Claim
Patent Images
1. A substrate holding device comprising:
- a base body having a flat plate-like shape and including;
an upper surface;
a lower surface; and
a plurality of upper protrusions protruding upward from the upper surface;
the base body defining;
a groove that opens on the lower surface; and
at least one gas hole extending from the upper surface to the groove;
the base body further including a plurality of first lower protrusions protruding downward in the groove.
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Abstract
A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.
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Citations
3 Claims
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1. A substrate holding device comprising:
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a base body having a flat plate-like shape and including; an upper surface; a lower surface; and a plurality of upper protrusions protruding upward from the upper surface; the base body defining; a groove that opens on the lower surface; and at least one gas hole extending from the upper surface to the groove; the base body further including a plurality of first lower protrusions protruding downward in the groove. - View Dependent Claims (2, 3)
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Specification