SUBSTRATE HOLDING DEVICE

• US 20170345701A1
• Filed: 05/22/2017
• Published: 11/30/2017
• Est. Priority Date: 05/25/2016
• Status: Active Grant

• Current Assignee: Niterra Co., Ltd.
• Original Assignee: NGK Spark PLUG Company Limited (Niterra Co., Ltd.)
• Inventors: ISHINO, Tomohiro, KIKUCHI, Shinya
• Granted Patent: US 10,770,334 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions

Abstract

A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.

Claims

1. A substrate holding device comprising:

a base body having a flat plate-like shape and including;

an upper surface;

a lower surface; and

a plurality of upper protrusions protruding upward from the upper surface;

the base body defining;

a groove that opens on the lower surface; and

at least one gas hole extending from the upper surface to the groove;

the base body further including a plurality of first lower protrusions protruding downward in the groove.

2. The substrate holding device according to claim 1,

wherein a first loop-shaped lower protrusion that surrounds the groove in a loop shape and a second loop-shaped lower protrusion that surrounds the first loop-shaped lower protrusion in a loop shape are formed on the lower surface of the base body so as to protrude downward, and

wherein a second lower protrusion that protrudes downward from the lower surface of the base body is formed between the first loop-shaped lower protrusion and the second loop-shaped lower protrusion.

3. The substrate holding device according to claim 2,

wherein lower end surfaces of the first lower protrusions and a lower end surface of the second lower protrusion are located on substantially the same plane, and

wherein a lower end surface of the first loop-shaped lower protrusion and a lower end surface of the second loop-shaped lower protrusion are located lower than the lower end surfaces of the first and second lower protrusions by between 1 μ

m and 5 μ

m.