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SUBSTRATE HOLDING DEVICE

  • US 20170345701A1
  • Filed: 05/22/2017
  • Published: 11/30/2017
  • Est. Priority Date: 05/25/2016
  • Status: Active Grant
First Claim
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1. A substrate holding device comprising:

  • a base body having a flat plate-like shape and including;

    an upper surface;

    a lower surface; and

    a plurality of upper protrusions protruding upward from the upper surface;

    the base body defining;

    a groove that opens on the lower surface; and

    at least one gas hole extending from the upper surface to the groove;

    the base body further including a plurality of first lower protrusions protruding downward in the groove.

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