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DEFECT INSPECTION METHOD AND APPARATUS THEREFOR

  • US 20170356856A1
  • Filed: 06/05/2017
  • Published: 12/14/2017
  • Est. Priority Date: 06/09/2016
  • Status: Active Grant
First Claim
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1. A defect inspection method of inspecting whether or not a defect exists on an object to be photographed, by irradiating striped illumination with respect to the object to be photographed, and based on an image obtained from the object to be photographed, comprising the steps of:

  • irradiating striped illumination on the object to be photographed from a striped illumination irradiating unit;

    photographing, by an image capturing unit, the object to be photographed which is irradiated with the striped illumination, and obtaining a source image;

    obtaining a first filter-processed image by a first filtering process that carries out either one of a maximum value filtering process or a minimum value filtering process with respect to the source image;

    obtaining a second filter-processed image by a second filtering process that carries out a remaining one of the minimum value filtering process or the maximum value filtering process with respect to the first filter-processed image;

    obtaining a difference image in which a difference from the source image is determined using the second filter-processed image as a background image; and

    performing a binarization process with respect to the difference image, and obtaining a binarized image for determining whether or not a defect exists within an imaging range.

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