SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM
First Claim
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1. A substrate liquid processing apparatus comprising:
- a liquid processing unit configured to store a processing liquid and substrates and process the substrates using the processing liquid, the processing liquid including a phosphoric acid aqueous solution;
a processing liquid supply unit including a supply pump configured to supply the processing liquid to the liquid processing unit;
a boiling state detecting unit provided in the liquid processing unit and configured to detect a boiling state of the processing liquid; and
a controller configured to control the supply pump based on a signal from the boiling state detecting unit and adjust a pressure of the processing liquid in a flow path supplied from the processing liquid supply unit to the liquid processing unit.
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Abstract
A substrate liquid processing apparatus includes a liquid processing unit, a processing liquid circulating line, and a boiling state detecting unit provided in a processing bath of the liquid processing unit. The controller controls a supply pump of the processing liquid circulating line based on a signal from the boiling state detecting unit, and adjusts a pressure of a supplied phosphoric acid aqueous solution in a flow path so as to adjust the boiling state of the phosphoric acid aqueous solution to a desired state.
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Citations
9 Claims
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1. A substrate liquid processing apparatus comprising:
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a liquid processing unit configured to store a processing liquid and substrates and process the substrates using the processing liquid, the processing liquid including a phosphoric acid aqueous solution; a processing liquid supply unit including a supply pump configured to supply the processing liquid to the liquid processing unit; a boiling state detecting unit provided in the liquid processing unit and configured to detect a boiling state of the processing liquid; and a controller configured to control the supply pump based on a signal from the boiling state detecting unit and adjust a pressure of the processing liquid in a flow path supplied from the processing liquid supply unit to the liquid processing unit. - View Dependent Claims (2, 3, 4)
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5. A method of performing a liquid processing on substrates, the method comprising:
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processing the substrates using a processing liquid including a phosphoric acid aqueous solution in a liquid processing unit that stores the processing liquid and the substrates; supplying the processing liquid to the liquid processing unit by a processing liquid supply unit including a supply pump; detecting a boiling state of the processing liquid by a boiling state detecting unit provided in the liquid processing unit; and controlling the supply pump based on a signal from the boiling state detecting unit by a controller and adjusting a pressure of the processing liquid in a flow path supplied from the processing liquid supply unit to the liquid processing unit. - View Dependent Claims (6, 7, 8)
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9. A storage medium causing a computer to execute a method of performing a liquid processing on substrates, the method comprising:
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processing the substrates using a processing liquid including a phosphoric acid aqueous solution in a liquid processing unit that stores the processing liquid and the substrates; supplying the processing liquid to the liquid processing unit by a processing liquid supply unit including a supply pump; detecting a boiling state of the processing liquid by a boiling state detecting unit provided in the liquid processing unit; and controlling the supply pump based on a signal from the boiling state detecting unit by a controller and adjusting a pressure of the processing liquid in a flow path supplied from the processing liquid supply unit to the liquid processing unit.
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Specification