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SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM

  • US 20170358470A1
  • Filed: 06/08/2017
  • Published: 12/14/2017
  • Est. Priority Date: 06/09/2016
  • Status: Active Grant
First Claim
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1. A substrate liquid processing apparatus comprising:

  • a liquid processing unit configured to store a processing liquid and substrates and process the substrates using the processing liquid, the processing liquid including a phosphoric acid aqueous solution;

    a processing liquid supply unit including a supply pump configured to supply the processing liquid to the liquid processing unit;

    a boiling state detecting unit provided in the liquid processing unit and configured to detect a boiling state of the processing liquid; and

    a controller configured to control the supply pump based on a signal from the boiling state detecting unit and adjust a pressure of the processing liquid in a flow path supplied from the processing liquid supply unit to the liquid processing unit.

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