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MASK ASSEMBLY FOR THIN FILM DEPOSITION AND METHOD OF MANUFACTURING THE SAME

  • US 20170369983A1
  • Filed: 06/22/2017
  • Published: 12/28/2017
  • Est. Priority Date: 06/24/2016
  • Status: Active Grant
First Claim
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1. A mask assembly for thin film deposition, the mask assembly comprising:

  • a glass mask comprising a first surface and a second surface opposite the first surface;

    a first metal layer patterned above the first surface of the glass mask; and

    a second metal layer patterned below the second surface of the glass mask,wherein;

    a plurality of deposition areas are arranged on the glass mask; and

    a plurality of deposition pattern portions, each comprising a plurality of slits, are patterned in the deposition areas.

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