MOCVD System for Growth of III-Nitride and Other Semiconductors

• US 20170369995A1
• Filed: 06/21/2017
• Published: 12/28/2017
• Est. Priority Date: 06/22/2016
• Status: Active Grant

• Current Assignee: University of South Carolina
• Original Assignee: University of South Carolina
• Inventors: Khan, Asif
• Granted Patent: US 10,000,845 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/303 Nitrides
• CPC Class Codes: C23C 16/34 Nitrides C23C16/303 takes precedence
• CPC Class Codes: C23C 16/4409 characterised by sealing means
• CPC Class Codes: C23C 16/4411 Cooling of the reaction chamber walls C23C16/45572 takes precedence
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD

Abstract

An MOCVD system for growing a semiconductor layer on a substrate is provided. The MOCVD system includes an MOCVD growth chamber defined by a jacket having an interior surface and an exterior surface; a water flow chamber surrounding an exterior surface of the jacket of the MOCVD growth chamber; an electronic control system, wherein the electronic control system facilitates pulsed growth of the semiconductor layer; a supply tube comprising a head formed from a hollow structure defining a fitting end and an opposite, shower end, wherein the fitting end has an initial diameter that is less than a diameter at the shower end; and a susceptor configured to hold the substrate and facing the shower end of the supply tube, wherein the MOCVD system operates at a temperature greater than or equal to 1500° C.

Claims

1. An MOCVD system for growing a semiconductor layer on a substrate, the MOCVD system comprising:

an MOCVD growth chamber defined by a jacket having an interior surface and an exterior surface;

a water flow chamber surrounding an exterior surface of the jacket of the MOCVD growth chamber;

an electronic control system, wherein the electronic control system facilitates pulsed growth of the semiconductor layer;

a supply tube comprising a head formed from a hollow structure defining a fitting end and an opposite, shower end, wherein the fitting end has an initial diameter that is less than a diameter at the shower end; and

a susceptor configured to hold the substrate and facing the shower end of the supply tube, wherein the MOCVD system operates at a temperature greater than or equal to 1500°

C.

2. The MOCVD system as in claim 1, wherein the water flow chamber is connected to a water supply line.

3. The MOCVD system as in claim 1, further comprising a liner, wherein the liner is replaceable.

4. The MOCVD system as in claim 3, wherein the liner comprises quartz, boron nitride, a ceramic, or a combination thereof.

5. The MOCVD system as in claim 1, wherein the jacket comprises quartz.

6. The MOCVD system as in claim 1, wherein the head is conical, wherein the fitting end has an initial diameter that is less than a diameter at the shower end, further wherein the head defines an expanding area along its length.

7. The conical supply tube as in claim 6, wherein the conical head comprises quartz, boron nitride, a ceramic, or a combination thereof.

8. The MOCVD system as in claim 1, wherein a shower plate is attached to the shower end of the conical head.

9. The MOCVD system as in claim 8, wherein the shower plate defines a plurality of apertures therein.

10. The MOCVD system as in claim 9, wherein the apertures are substantially equally spaced across the shower plate.

11. The MOCVD system as in claim 8, wherein the shower plate comprises quartz, boron nitride, a ceramic, or a combination thereof.

12. The MOCVD system as in claim 1, wherein the supply tube is connected to an arm, wherein the arm facilitates movement of the supply tube towards the substrate and the susceptor.

13. The MOCVD system as in claim 12, wherein a supply tube moving element controls the movement of the arm.

14. The MOCVD system as in claim 1, wherein the susceptor is connected to an arm, wherein the arm facilitates movement of the substrate and susceptor towards the supply tube.

15. The MOCVD system as in claim 14, where a susceptor moving element controls the movement of the arm.

16. The MOCVD system as in claim 1, wherein a steel sealing is attached to the fitting end of the head to form an air-tight seal.

17. A method for growing a semiconductor layer on a surface of a substrate, the method comprising:

introducing a source gas into the MOCVD chamber of claim 1 through the supply tube, wherein the supply tube defines a terminal end at a distance of about 0.5 inches to about 10 inches from the surface of the substrate, wherein the source gas comprises at least one of a metal-organic source gas, a boron source gas, or a nitrogen source gas; and

cooling the MOCVD chamber via the water flow chamber, wherein water is delivered to the water flow chamber via a water supply line.

18. The method as in claim 17, wherein a liner is disposed on the interior surface of the MOCVD chamber, wherein the liner is removed from the MOCVD chamber and replaced with a new liner after the semiconductor layer is removed from the MOCVD chamber and before an additional semiconductor layer is grown in the MOCVD chamber.

19. The method as in claim 17, wherein the semiconductor layer comprises a group III layer or a group III-V layer.

20. The method as in claim 19, wherein the semiconductor layer comprises an AlInGaBN layer.